Digital Library

The next generation quantum computing platforms need to trap and to prepare ions or neutral atoms excited to Rydberg states. The experimental setup requires the entry of laser light of numerous wavelengths at different angles of incidence into a high vacuum fused silica cell. The optical spectrum ranges from the UV to near infrared range (317-813nm) and the angles of incidence (AOI) can reach up to 60°. Especially at high AOI, the Fresnel reflections occurring at each glass interface can reach non-negligible levels. The paper presents a technology called AR-plas2, which is based on nanostructures with very low effective refractive indices. This opens great design opportunities with outstanding antireflective (AR) properties in terms of low residual reflectance, AOI tolerance as well as polarization neutrality in comparison to conventional AR coatings. The work presented here is part of the joint project Qzell carried out by research partners from institute and industrial partners in Germany.

https://doi.org/10.14332/svc25.proc.0040

The Oerlikon Balzers DOMINO Equipment platform is the most versatile thin film equipment available on the market. Our state of the art thin film equipment has been developed using the expertise that comes from over 30 years of industrial experience in not only building equipment, but operating it in coating centers around the world. For Oerlikon Balzers DOMINO, this means offering highly efficient system solutions and setting trends in surface treatment. Our DOMINO platform offers multiple technology modules, as well as focused individual solutions based on our know-how and expertise. The DOMINO platform is highly flexible to allow you to meet your needs today, AND tomorrow. We look forward to explaining key features of this versatile line of PVD/PACVD equipment.

https://doi.org/10.14332/svc25.proc.0044

Physical Vapor Deposition (PVD) has been routinely employed over the past half century for the production of thin isotopically enriched metal targets at facilities producing accelerated beams for nuclear physics studies. The Center for Accelerator Target Science (CATS) at Argonne National Laboratory (ANL) is tasked with the preparation of such targets for the Low-Energy Nuclear Physics Community in the United States as well as demands worldwide using a variety of techniques. We concentrate our efforts primarily on thermal evaporation of the isotopic metals required using state-of-the-art vacuum deposition systems. Thin films of the desired target material are deposited onto glass substrates with thicknesses ranging from sub-micron to many kilo-angstroms. To obtain free-standing foils, the glass is first treated with a parting agent for release from the substrate. Occasionally these deposits are, by necessity, evaporated onto already mounted thin backings foils which act only as a spectator during the accelerator physics experiments. The separated isotopic target starting materials are obtained from the National Isotope Development Center at Oak Ridge National Laboratory (ORNL) usually as metal powder. In some instances, when the metallic form is not available, certain chemical and metallurgical processes become necessary before deposition. Current work on the production of these targets and some examples will be presented.

https://doi.org/10.14332/svc25.proc.0028

Multi-component ceramic coatings such as TiN, CrN, TiAlN, TiCrN, TiCrSiN and Hard carbon coatings (HCC) were used in wide range of industrial applications, as these have excellent mechanical, chemical and biological properties. These coatings were synthesized by the vapour-phase method from an arc ion plating process. PVD (Physical Vapor Deposition) coating technologies were commonly used in carrying out ceramic coatings, where the coating materials are vaporized from the source and then transported in the form of a vapour through a vacuum or plasma environment to the substrates.

https://doi.org/10.14332/svc25.proc.0022

In this study, we introduce an alternative leak detection method based on remote plasma optical emission spectroscopy (RPOES). The technique exploits plasma-induced light emission to detect leaks in real time, enabling both detection and localisation using trace gases such as argon that are relatively inexpensive and readily available. Compared with mass-filter helium detectors, RPOES provides greater robustness, the ability to operate at higher pressures, and reduced maintenance demands. We outline the principles of RPOES, emphasise its advantages in detecting gases commonly linked to vacuum leaks (including water vapor and air), and assess its viability as a practical alternative to helium-based methods. Case studies are presented to demonstrate its effectiveness in identifying leaks across a range of coating applications, with ultimate aim to improved process stability, enhanced coating quality, and lower operational costs.

https://doi.org/10.14332/svc25.proc.0038

A common type of residual gas analyzer is the quadrupole mass spectrometer. One of the main components within this instrument is a mass filter known as the quadrupole. It is responsible for the selective throughput of the ionized gas particles - by ascending mass number - prior to ion impacts on the analyzer (or detector) surface from which the ion current signal is generated for processing. However, the quadrupole is not fully described in relation to the electric field characteristics and the function as an ion mass separator. This paper describes the basic origins of the electrical design, the intricate assembly criteria, and performance of the quadrupole within the spectrometer.

A specialized quadrupole mass spectrometer is part of a configuration for a diagnostic gas analyzer system planned for ITER, a fusion research machine. It has a verified capability, essential as a diagnostic criterion for this reactor project, to successfully deconvolute the mass signals of Helium-4 and deuterium (reactor fuel exhaust gases, separated by only 0.026 atomic mass units), down to a relative three-percent concentration of the former gas. The associated preliminary testing, performed at the Oak Ridge National Laboratory, is also addressed. Finally, one of the key parameters used to express gas concentration, the relative sensitivity factor, will be explained, including an evaluation of dependency on other variables.

https://doi.org/10.14332/svc25.proc.0021

Calibrating transmittance is easy, stable, and reliable. Calibrating reflectance is much more vulnerable to errors. Reflectance attachments for spectrophotometers are reviewed and their pitfalls. Working standards for reflectance are described. Linearity calibration is discussed. Suggestions for the fabrication of a near-100% reflectance working standard are provided at length.

https://doi.org/10.14332/svc25.proc.0018

The advent of Zoom and Team Meetings and other face-time communications has made the annoyance of reflections from uncoated eyeglasses more apparent. Even the residual reflections from some of the current commercially available antireflection (AR) coatings can be distracting. The goal of this work is to find the most practical recommended AR coating design for the next generation of eyeglass coatings which will effectively eliminate these annoying reflections which are currently seen when in a Zoom or Teams meeting with those who do not have sufficiently well-coated glasses. The evolution of the designs from many layers to the recommended four layers will be presented.

https://doi.org/10.14332/svc25.proc.0017

Rugate optical thin films have been studied for several decades, particularly for the application to laser eye protection filters (LEPF). The principles of rugates and Herpin equivalent layers are briefly reviewed. The combination of these concepts to overcome the bandpass limitations of shortwave pass filters is shown. The use of Alfred Thelen’s minus filters to make LEPF is discussed. The use of higher harmonic bands of quarter wave optical thickness (QWOT) stacks for LEPF is explained. The application of thickness ratios in layer pairs other than QWOTs is shown to lead to better alternatives for LEPF than rugates.

https://doi.org/10.14332/svc25.proc.0019

Sputtered oxide thin films hold enormous potential in a wide range of both mature and growing new applications, from energy-efficient glazing and advanced displays to next-generation energy generation and storage solutions. Their unique ability of tunable morphology, providing a desired combination of optical performance and electrical properties, makes them a key component for emerging technologies. Among the various deposition methods, sputtering of ceramic targets has proven to be a versatile and efficient technique for producing high-quality oxide thin films with tailored properties. This study investigates the role of recently developed ceramic target materials in achieving high deposition rates, enhanced material utilization and improved film properties compared to traditional sputtering of metallic targets. Ceramic targets offer superior thin film stoichiometric control, ensuring precise composition of the deposited thin films. Furthermore, combining these targets with advanced sputtering and inline metrology equipment provide enhanced process stability, allowing to maintain film uniformity and composition in large area and industrial production environments. The introduction of easy-to-use process control tools as part of an advanced system software platform enables achieving and sustaining the desired performance of these thin films. Our presented findings will highlight the immense potential of ceramic targets in advancing technologies for use in electrochromic devices, photovoltaic systems, and thin-film batteries. By enabling high-performance solutions, ceramic target-based sputtering addresses the growing demand for functional coatings in large-area applications. These innovations unlock new possibilities for scalable and sustainable technologies, making sputtered oxide thin films from ceramic targets and in combination with advanced magnetron and process capabilities a cornerstone for future advancements in materials science and engineering.

https://doi.org/10.14332/svc25.proc.0016