Ellipsometry is an important characterization technique for optical coatings. This tutorial will build an understanding of ellipsometry fundamentals. We start with basic theory behind optical measurements and discuss how ellipsometry extracts thin film properties such as single and multi-layer film thickness, complex refractive index, porosity, conductivity, and composition. A wide range of ellipsometry applications will be surveyed, with emphasis toward optical coatings.

The level of this tutorial is suitable for those new to the field of optical characterization but also contains worth-while information for current ellipsometry users. It will benefit anyone interested in exploring the potential of ellipsometry measurements.

Topical Outline:

  • Principles of ellipsometry
  • Optical constants and light-matter interaction
  • Using Ellipsometry to measure material properties
    • Film thickness, complex refractive index, …
  • Survey of applications:
    • What can Ellipsometry measure?
    • Ex-situ, in-situ, and in-line examples.

 

I. Principles of Ellipsometry
• Light and Polarization
• Optical constants and light-matter interaction
• Model-based Analysis

II. Using Ellipsometry to Measure Material Properties
• Film Thickness
• Complex Refractive Index
• Surface and Interfacial Regions
• Optical Gradients
• Composition
• Crystallinity
• Conductivity

III. Survey of Applications: ex-situ, in-situ, and in-line
• Optical Coatings
• Transparent Conductive Oxides
• Thin Film Photovoltaics
• In-situ and In-Line Monitoring and Control

Instructor: James N. Hilfiker, J.A. Woollam