PLASUS GmbH is a leading manufacturer of spectroscopic plasma monitor and process control systems. Founded in 1996, the core competence is the development of turn-key process control systems for industry and R&D applications. The systems are applied for plasma monitoring, process control, process optimization, quality control and spectroscopic plasma analysis in all kind of markets where plasma processes are involved: architectural glass coating, solar cell production, semiconductor industry, hard coating of cutting tools, decorative coatings etc.
Our turnkey multi-channel PLASUS EMICON systems are highly recognized in the market and are applied to a large variety of applications such as PECVD, PVD, reactive sputtering, HIPIMS, endpoint detection, quality control, chamber matching, fault detection, etc.
PLASUS provides also optical in-vacuum components with coating protection device for safe and low maintenance use in production lines.
The spectroscopy software PLASUS SpecLine is a unique software tool for analysing spectral data, which includes an extended and up-to-date database for atomic lines and, in particular, for molecular bands.
PLASUS SpecLine allows a very easy and fast identification of detected species from spectra.
PLASUS has a worldwide distributor network with main representatives in North America and Asia.