
Founded in 1999, Plasma Process Group provides high performance ion beam sources, systems, and components required for precision thin film deposition and etching applications. Our scientists are experts in ion optics, ion beam sources, and associated RF technologies. We offer a fully integrated Broadband OMS in our NEW Techne and Techne 5G ion beam deposition tools. We complement our group with a complete service and support center, servicing a variety of ion beam equipment.