Digital Library

Plasma Engineering LLC is a start-up consulting company registered in California. Founder/CEO is André Anders, who has worked in the field of plasmas, plasma diagnostics and plasma-based coatings for over 30 years. André’s work has been recognized by SVC’s Mentor Award (2011) and the Nathaniel Sugerman Memorial Award (2016), among other awards. Plasma Engineering LLC serves two related markets in plasma and ion beam processing of materials: (1) customized consulting and (2) customized educational workshops designed to empower companies’ employees. Given the growing needs within the US and world-wide, especially in the field of plasma-based semiconductor manufacturing, Plasma Engineering LLC offers workshop / short courses for continuing education. The two fields, direct consulting and continuing education, are not exclusive but can be synergistic. Based on André’s expertise in experimental physics and teaching experience as Professor of Applied Physics, consulting topics include, but are not limited to, (reactive) magnetron sputtering, HiPIMS, cathodic arc deposition, plasma and process diagnostics, plasma and ion source developments, plasma-based deposition, ion sources, ion beam deposition and etching. An overview can be found at https://plasmaengineering.com/. Due to the company’s start-up phase, now is a good time to secure short- and long-term relationships.

https://doi.org/10.14332/svc25.proc.0033

Telemark ion beam sources have been designed to provide superior performance across large and small substrates. Telemark technology offers low pressure operation (10^-5 mbar) for a longer mean free path and higher ion energies than traditional End Hall sources. The source design is extremely low maintenance with no consumable components except for filaments. The Telemark ion beam source line is capable of either mixed gas or pure oxygen operation, allowing for deposition of metal oxide films of the highest index and lowest stress. Pulsed Mode for ion assisted fluorides provides fully compacted, damage free results not achievable with any other ion source. Telemark sources achieve stable films with no substrate preheating and are an excellent choice for depositing durable films on low temperature substrates.

https://doi.org/10.14332/svc25.proc.0034

For many years DHF Technical Products has been known for its leadership and excellence in delivering superior solutions in high-quality precious metal targets. In an environment of high precious metal prices, it becomes more and more important to manage the total cost of ownership of a sputtering target. Quality, delivery, and timely communication are the cornerstone of great relationships but managing refining and recovery of spent targets and chamber sweeps efficiently can significantly minimize your cost of ownership. With decades of experience managing total cost of ownership through innovative design, precise back-end accounting, and comprehensive management of spents, sweeps and scrap, let us help you maximize the value for your precious metal target spend!

https://doi.org/10.14332/svc25.proc.0031

Rugate optical thin films have been studied for several decades, particularly for the application to laser eye protection filters (LEPF). The principles of rugates and Herpin equivalent layers are briefly reviewed. The combination of these concepts to overcome the bandpass limitations of shortwave pass filters is shown. The use of Alfred Thelen’s minus filters to make LEPF is discussed. The use of higher harmonic bands of quarter wave optical thickness (QWOT) stacks for LEPF is explained. The application of thickness ratios in layer pairs other than QWOTs is shown to lead to better alternatives for LEPF than rugates.

https://doi.org/10.14332/svc25.proc.0019

TiO₂ films were sputtered by a bipolar pulsed-DC process from a pair of sub-stoichiometric TiO_x targets. By utilizing process gas analysis, we find that the largest impact on a reliable batch process lies in both the control of the adsorbed humidity and inlet of oxygen sputtering gas. After establishing this understanding, we show that high quality films can be deposited for any pulsing frequency between 0.5 kHz and 50 kHz with the lower frequencies having a beneficial impact on refractive index, the substrate temperature, and less energy losses at the sputtering power supply.

https://doi.org/10.14332/svc25.proc.0041

This study explores the synthesis and characterization of Titanium Aluminum Carbon Nitride (TiAlCN) coatings, a pioneering advancement in surface engineering. Using reactive High Power Impulse Magnetron Sputtering (HiPIMS), we deposited TiAlCN coatings with varying carbon content (1.3 - 58.1 at.%) by modulating the acetylene flow rate. X-ray diffraction analysis revealed a carbon solubility limit of 17 at.% in the TiAlN structure, beyond which TiAl(CN) nanocrystals and an amorphous carbon phase emerged. This structural evolution significantly impacted the coatings' properties. Notably, increasing carbon content noticeably reduced the coefficient of friction from 0.62 (TiAlN) to 0.22 (42 at.% C), enhancing tribological performance. However, high carbon concentrations impeded aluminum diffusion, hindering the formation of a protective Al₂O₃ layer and consequently diminishing corrosion resistance. Additionally, the presence of amorphous carbon between grains at elevated carbon levels led to a reduction in the coatings' mechanical properties.

https://doi.org/10.14332/svc25.proc.0025

The aim of this study was to increase the dental drill lifetime and performance by using wear-resistant diamond like carbon (DLC) coatings to enhance success rate of an implant surgery.

>For DLC protective coating development, the PF650 system manufactured by PROTEC was employed. The PF650 is equipped with 4 magnetrons (800x100 mm) powered by High Power Impulse Magnetron sputtering (HIPIMS) sources from VIESCA, and pulsed dc plasma enhanced chemical vapor deposition (PECVD) technology. Different DLC coatings were initially deposited on flat samples at different C₂H₂ pressures and characterized by scanning electron microscopy, Raman spectroscopy, nanoindentation and adhesion tests. Cr adhesion layer using HIPIMS technology was optimized for adhesion improvement. The best-performing DLC coating was deposited on dental drills and analyzed by confocal microscope to ensure coating adhesion on cutting edges.

https://doi.org/10.14332/svc25.proc.0024

Since the 1960s, pioneering work in Electron Beam Physical Vapor Deposition (EB-PVD) of metal strips has led to the installation of numerous pilot and production plants worldwide. However, the demand for ongoing development in a variety of application areas remains strong. To meet the changing challenges of modern industry, multifunctional equipment is essential. In 2000, the innovative inline vacuum coating plant for sheets and metal strips called MAXI was set into operation at Fraunhofer FEP in Dresden, Germany, to address global research and development needs. This modular system, comprising eight chambers, allows for the sequential execution of different process steps and offers the flexibility to operate in both sheet-to-sheet and roll-to-roll modes. This results in more efficient, faster, and easier progress during the early stages of development, as well as a smoother process transfer for the upscaling. In celebration of MAXI's 25th anniversary, we will provide an overview of the diverse research projects realized over the years — from metallurgy and semiconductor applications to cutting-edge solutions for today’s energy technologies. Additionally, we will discuss current modernization activities.

https://doi.org/10.14332/svc25.proc.0001

The production of functional coatings on metal, glass, and polymer substrates through sputtering has been established on an industrial scale for 50 years. Porous or highly outgassing substrates such as paper or wood are generally considered incompatible with vacuum coating technologies. While there have been isolated studies on feasibility, systematic research results remain largely absent. Paper is a natural, renewable raw material. The coating of tear-resistant paper in roll form is cost-effective and can significantly contribute to reducing plastic waste, thereby promoting sustainability. Potential applications for coated paper include:

• Sensors: Use in conductivity analyses in chemical process engineering and for paper-based multi-electrode arrays (MEAs) in biotechnological research.
• Electronics: Application as a dielectric in thin-film transistors (TFTs).
• Barrier coatings: Protection against moisture, oxygen, and other gases, e.g., for food packaging to extend shelf life.
• Hygienic applications: Antimicrobial silver coatings for wall coverings, medical packaging, or hygiene papers.

Various sputtering techniques from gas flow sputtering to HIPIMS (High Power Impulse Magnetron Sputtering) allow a broad variation of energy levels of film forming species. In a first study, two different paper types (7×3 cm²) were successfully coated with silver, titanium and titania in a short cycle system using DC sputtering at target power densities up to 7,7 W/cm². Structural investigations by Environmental Scanning Electron Microscopy (ESEM) show that the fibres are well encapsulated by the coating (conformity) and that structural changes occur, indicating improved functional properties. Further investigations include adhesion tests and long-term stability assessments. The study provides valuable insights into the application of vacuum coating on paper and opens new possibilities for sustainable and functional materials across various applications. The results and challenges of implementation will be discussed.

https://doi.org/10.14332/svc25.proc.0004

Redwire’s heritage efforts have included manufacturing prototypes and science enablers for individuals doing work in orbit and can find their foundation in work performed on Space Shuttle missions starting over 30 years ago. A recent focus for us has been the systems that facilitate the development of pharmaceutical crystals.

In general, both small and large molecule drugs, are often best formulated as crystals. The crystalline state is more easily handled, isolated and is relatively stable but can suffer from polymorphism and size coefficients of variation that are too large. A potential solution to these problems was impressed upon us by the result found in the microgravity enabled crystal growing experiment of the monoclonal antibody, Pembrolizumab marketed by Merck as the product, Keytruda. Creating new forms and potentially improving the existing forms of drugs in microgravity with greater crystalline uniformity and less variation in size allows for new polymorphs could lead to faster development times, less waste in the process of making the drugs, and possibly lead to new modes of delivery. We will present results demonstrating the difference in crystals formed terrestrially vs those generated on the International Space Station Platform and describe the use of those crystals for future terrestrial production of pharmaceuticals.

https://doi.org/10.14332/svc25.proc.0002