Deposition Control Technology for Arc Ion-Plating Process

Multi-component ceramic coatings such as TiN, CrN, TiAlN, TiCrN, TiCrSiN and Hard carbon coatings (HCC) were used in wide range of industrial applications, as these have excellent mechanical, chemical and biological properties. These coatings were synthesized by the vapour-phase method from an arc ion plating process. PVD (Physical Vapor Deposition) coating technologies were commonly used in carrying out ceramic coatings, where the coating materials are vaporized from the source and then transported in the form of a vapour through a vacuum or plasma environment to the substrates.

https://doi.org/10.14332/svc25.proc.0022