The Promise of Vacuum System Technology (VST)

Our engineering team, with over 40 years' experience, is offering custom made, deposition systems including but not only: Sputtering, EB gun, Thermal, Ion Beam, Plasma, ALD – PLD and Low Temperature organic materials. With reputation for excellence - hundreds of satisfied customers in the high vacuum and ultra-high vacuum industry, research labs and scientific community around the world.
VST developed cluster tools with robot sample transfer often integrated with Inert Gas Glove Box and encapsulation for OLED processes.

https://doi.org/10.14332/svc24.proc.0055