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Thread: ion source use life

Created on: 09/22/09 12:00 AM

Replies: 1


Joined: 08/05/09

Posts: 3

ion source use life
09/22/09 10:15 AM

We seem to have to replace the ion source very often (every 4 wks). I was wondering if this is a normal life time or should I be looking at other factor in my process.

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Joined: 02/24/10

Posts: 1

RE: ion source use life
02/24/10 5:09 PM

Hi Rudy, what kind of ion source is it? If its a linear ion source with a metal based anode / cathode then they can sputter quickly. We use a carbon based anode and cathode that sputters at a low rate as the sputter yield of carbon is so low compared to metals. This gives a very long life-time. Dermot.

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