Loading
SVC Forum
New Topic Reply
Next Page

1

Previous Page

Thread: ion source use life

Created on: 09/22/09 12:00 AM

Replies: 1

rudy





Joined: 08/05/09

Posts: 3

ion source use life
09/22/09 10:15 AM

We seem to have to replace the ion source very often (every 4 wks). I was wondering if this is a normal life time or should I be looking at other factor in my process.


[Edit Post]

Link | Top | Bottom

Dermotmgn





Joined: 02/24/10

Posts: 1

RE: ion source use life
02/24/10 5:09 PM

Hi Rudy, what kind of ion source is it? If its a linear ion source with a metal based anode / cathode then they can sputter quickly. We use a carbon based anode and cathode that sputters at a low rate as the sputter yield of carbon is so low compared to metals. This gives a very long life-time. Dermot.


[Edit Post]

Link | Top | Bottom

New Topic Reply
Next Page

1

Previous Page

New Post

Please login to post a response.

Contact Us | Member Login  | Use and Privacy Policy | Forum Terms of Use
Galleon Forums was created by Raymond Camden
© Copyright 2006-2018, Society of Vacuum Coaters (SVC™)
All Rights Reserved

Follow SVC on Twitter
Society of Vacuum Coaters
P.O. Box 10628
Albuquerque, NM 87184
Phone 505/897-7743
Fax 866/577-2407
svcinfo@svc.org