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Thread: Flux Distribution?

Created on: 08/14/08 12:00 AM

Replies: 0

donmattox





Joined: 08/04/08

Posts: 3

Flux/flux distribution
08/14/08 11:39 AM

What is the flux, flux distribution and energy distribution of the high energy reflected neutrals during High Power Impulse Magnetron Sputtering? How do they affect the nucleation and growth of the deposits formed? Don Mattox


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