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Thread: Back Calculating Correct Thickness from FTM

Created on: 09/29/08 12:00 AM

Replies: 0

hubmachine





Joined: 09/29/08

Posts: 1

Back Calculating Correct Thickness from FTM
09/29/08 12:01 PM

We recently got our Edwards ebeam up and running. First deposition was Al, we thought. We set up the FTM with Z and density for AL. Ran three samples, 1 ~100nm, 2 ~200nm, and 3 ~300nm. Ran RBS on samples to calculate tooling factor. Realized films were Ti, not Al.
Was wondering if anyone out there would know how to calculate corrected thickness with proper Z and density for Ti, with #s from Al?
Thanks
Cliff Hubbard


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