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Thread: Unconsistency of spectra

Created on: 11/11/10 12:00 AM

Replies: 0

leonidal





Joined: 11/11/10

Posts: 1

Unconsistency of spectra
11/11/10 8:35 AM

Hello,

We use a PVD coating chamber with a quartz crystal for thickness measurements.
The evaporation is carried out using an EBG and the pumping is done by a cryo pump.
From time to time the spectrum suddenly and vastly changes without apparent deviations in the process parameters.

Any ideas regarding the cause?


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