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Thread: heated Film Thickness Monitors

Created on: 08/29/08 12:00 AM

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Joined: 08/29/08

Posts: 1

heated Film Thickness Monitors
08/29/08 11:06 AM

I have been working on high temperature film thickness monitors, or QCM's, for several years now. I have been focusing on 500C and up processes, but the coming popularity of ALD indicates that sensors in the 200-300C range would be of value. Would any user of ALD processing like to give me some input as to what the value, if any, of a "hot" crystal as a film thickness monitor be?

Thanks in advance,

Scott Grimshaw
Tangidyne Corp

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