Effect of Interfacial Mechanical Properties on PVD/PACVD DLC Coatings

Diamond-like carbon (DLC) with comprehensive performance of low friction coefficient, high hardness, good abrasion resistance and high chemical stability gets wordwide excellent scientific research workers and enterprises attention. But because of the influence of DLC s preparation method and its limitation of the micro structure, its internal stress is very high and the adhesion strength is low. In order to improve bonding strength of DLC films, CrC is added as the transition layer between the film and substrate, preparation parameters and multilayer structure of CrC transition layer are researched. In order to further improve the DLC films binding strength for mechanical properties, WC transition layer was prepared by hybrid PACVD and PVD processes comparing with the traditional preparation system on the differences of structure and mechanical properties. The two interlayer studies proved that PVD interlayer played a key role in high quality DLC coating. It provides a new way for large-scale produced DLC films with low cost and excellent comprehensive properties.

https://doi.org/10.14332/svc18.proc.0066