Digital Library
Four-Cavity Narrow Bandpass Filter Coating with Ion-Assisted Vacuum Evaporation
Published: 2016 Technical Conference Proceedings, Optical Coatings (February 21, 2017)
  • Tolga Ergudere, Vacuum Process Technology LLC, Plymouth MA US
  • Ralph Faber, Vacuum Process Technology LLC, Plymouth MA US

Narrow bandpass filter coatings with ion-assisted evaporation is challenging considering the production requirements such as deposition uniformity, yield, in-situ optical monitoring, material stoichiometry, no vacuum-to-atmosphere spectral shift, and a fully automated, robust process. A four-cavity filter design with 3.5-nm bandwidth was coated by electron beam evaporation of SiO2 and tantalum compounds. Surface quality and film properties were enhanced by utilizing a high-power end-hall ion source. The fully automated process was directly optically monitored and controlled at near-infrared wavelength. Good deposition uniformity without any masks and great film quality with no spectral shift from vacuum to atmosphere provided the desired repeatable results that exceeded the production environment requirements.

DOI: dx.doi.org/10.14332/svc16.proc.0038

Document Info: Adobe Acrobat Format, 1003 KB

The SVC is proud to offer an open access policy to the comprehensive SVC digital library. The entire SVC collection of digitally stored Proceedings Manuscripts are available to all interested parties, at no charge as part of our Mission: “To promote technical excellence by providing a global forum to inform, educate, and engage the members, the technical community, and the public on all aspects of vacuum coating, surface engineering and related technologies”.

We kindly request that you consider SVC membership as a show of support for our activities to bring value to our diverse group of stakeholders. Click here for a SVC membership application.


Recent Searches
No recent searches
Recent Tagged Documents
No documents have
been tagged
Contact Us | Member Login  | Use and Privacy Policy | Forum Terms of Use
© Copyright 2006-2022, Society of Vacuum Coaters (SVC™)
All Rights Reserved
Follow SVC on Twitter Follow SVC on Instagram Society of Vacuum Coaters
P.O. Box 10628
Albuquerque, NM 87184
Phone 505/897-7743
Fax 866/577-2407