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Precision Multilayer Coating for Large High-End Mirrors
 
Published: 2015 Technical Conference Proceedings, Optical Coatings (November 23, 2015)
 
Authors:
  • R. Müller, Business Unit MicroSystems, Meyer Burger (Germany) AG, Hohenstein-Ernstthal DE
  • A. Luca, Business Unit MicroSystems, Meyer Burger (Germany) AG, Hohenstein-Ernstthal DE
  • A. Eibisch, Business Unit MicroSystems, Meyer Burger (Germany) AG, Hohenstein-Ernstthal DE
  • J. Landrock, Business Unit MicroSystems, Meyer Burger (Germany) AG, Hohenstein-Ernstthal DE
  • J. Mai, Business Unit MicroSystems, Meyer Burger (Germany) AG, Hohenstein-Ernstthal DE
  • R. Stober, Business Unit MicroSystems, Meyer Burger (Germany) AG, Hohenstein-Ernstthal DE
Abstract:
 

Magnetron sputter deposition (MSD) has been used for precision multilayer coating of large high-end extreme ultraviolet- (EUV) and X-ray-mirrors. The MS 2000 is equipped with up to six sputter magnetrons, rotatable substrate holder for face down deposition and turning substrate with pre-calculated velocity maps. All mechanical parameters can be precisely adjusted, providing accurate process control and reproducible multilayer deposition. Reflectivity (> 70 %), uniformity (> 99.9 %), and reproducibility (>99.9 %) are presented for Mo/Si/C coatings. Stress control of such multilayer systems is critical.

DOI:  dx.doi.org/10.14332/svc15.proc.1901


 
Document Info: Adobe Acrobat Format, 767 KB
 

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