Additional Information and Table of Contents
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Written by Donald M. Mattox
This publication contains individual, stand-alone, two-page guides on different aspects of the equipment and technology associated with thin film processing by physical vapor deposition. Titles of some of the sections are as follows: Introduction to the Basics of PVD Processing; Materials Science; Vacuum Technology; Plasma Technology; Surface Preparation; Vacuum Evaporation; Sputter Deposition; Arc Vapor Deposition; Ion Plating; Low-Pressure CVD and PECVD; Atomistic Film Growth and Resulting Film Properties; Surface and Film Characterization; Applications; and Safety. More than 100 Guides in one set! New titles are added periodically!
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