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1
Created on: 11/11/10 12:00 AM
Replies: 0
leonidal
Joined: 11/11/10
Posts: 1
Unconsistency of spectra
11/11/10 8:35 AM
Hello,
We use a PVD coating chamber with a quartz crystal for thickness measurements.
The evaporation is carried out using an EBG and the pumping is done by a cryo pump.
From time to time the spectrum suddenly and vastly changes without apparent deviations in the process parameters.
Any ideas regarding the cause?
1
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