Loading
Tutorial Course Descriptions

Detailed Syllabus

V-201 High Vacuum System Operation

This tutorial is intended for those who wish to learn how mechanical pumps and high vacuum pumps form a high vacuum system and how three such systems are operated. At the end of this tutorial, using all available materials, a participant should be able to explain the operation of diffusion, cryo, and turbo pumped systems; understand the differences between a viscous gas and a rarefied gas; and show how these differences govern the operation of the systems.

Topical Outline:

Introduction to vacuum systems

  • Rotary mechanical pumps
  • Diffusion pumps and systems
  • Cryogenic pumps and systems
  • Turbomolecular pumps and systems

Attendees in this tutorial receive the text, A User’s Guide to Vacuum Technology, 3rd edition, John O’Hanlon (John Wiley & Sons, 2003).

Course Details:

Introduction

This module is designed to ensure that all participants have the same starting knowledge, basic definitions, and descriptive terms used in vacuum technology.

  • Define a gas
  • Define pressure
  • Describe components of an atmospheric and a vacuum gas
  • Describe basic vacuum applications
  • Outline the functions of each component in a system
  • Review questions and summary of answers

Rotary Mechanical Pumps

This module covers the construction, characteristics, operating principles, and applications of the following low-rotational speed mechanical pumps:

  • Rotary vane pump including function of gas ballast
  • Piston pump
  • Roots or lobe blower including its economics
  • Claw pump
  • Screw pump
  • Scroll pump
  • Diaphragm pump
  • Review questions and summary of answers

 

Diffusion Pumps and Systems

This module first covers the construction, characteristics and operating principles of the diffusion pump. After these concepts are described, the construction and operating principles of a typical diffusion pumped system are covered.

  • Diffusion pump construction
  • Diffusion pump operating principle
  • What is pumping speed?
  • Backstreaming and its sources
  • How, why and when to use traps and baffles
  • Starting, cycling and stopping a diffusion pump system
  • Preventing contamination from oil migrating from pumps to chamber
  • Preventive maintenance issues
  • Review questions and summary of answers

Cryopumps and Systems

This module first covers the construction, characteristics and operating principles of the cryo pump. After these concepts are described, the construction and operating principles of a typical cryo pumped system are covered.

  • Cryo pump construction
  • Define vapor pressure
  • Pumping vapors and gases by cryocondensation
  • Pumping vapors and gases by cryosorption
  • Cryogenic pumping arrays
  • Relative pumping speed of various gases and vapors
  • Construction and operation of the helium gas refrigerator
  • Starting, cycling and stopping a cryo pumped system
  • Regenerating a cryo pump and why it is necessary
  • Preventing unwanted gases or vapors from contaminating the process chamber
  • Preventive maintenance issues
  • Review questions and summary of answers

Turbomolecular Pumps and Systems

This module first covers the construction, characteristics and operating principles of the turbomolecular pump. After these concepts are described, the construction and operating principles of a typical turbomolecular pumped system are covered.

  • Turbomolecular pump construction
  • Pumping gas by pumped by moving blades.
  • Pumping speed
  • Gas compression
  • Oil, grease and magnetically levitated bearing systems
  • Molecular drag pumps
  • Starting, cycling and stopping a turbomolecular pumped system
  • Preventing oil vapors from contaminating the process chamber
  • Preventive maintenance issues
  • Review questions and summary of answers

Instructor: John F. O’Hanlon, Professor Emeritus of Electrical and Computer Engineering, University of Arizona
John F. O’Hanlon

is Professor Emeritus of Electrical and Computer Engineering, the University of Arizona. He retired from IBM Research Division in 1987, where he was involved in thin-film deposition, vacuum processing, and display technology. He retired from UA in 2002, where he directed the NSF Ind./Univ. Center for Microcontamination Control. His research focused on particles in plasmas, cleanrooms, and ultrapure water contamination. He is the author of A User’s Guide to Vacuum Technology, 3rd edition. (John Wiley & Sons, 2003).


This course is currently available via:
On Location Education Program

Contact Us | Member Login  | Use and Privacy Policy | Forum Terms of Use
© Copyright 2006-2016, Society of Vacuum Coaters (SVC™)
All Rights Reserved

Follow SVC on Twitter
Society of Vacuum Coaters
9639 Kinsman Road
Materials Park, OH 44073-0002
Phone 505/856-7188
svcinfo@svc.org