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Tutorial Course Descriptions

Detailed Syllabus

V-204 Vacuum Systems, Materials and Operation

This tutorial course is intended for those who wish to learn how diffusion and cryo pump systems operate, how to choose materials for vacuum use, and how to pump water vapor properly during the rough pumping cycle. At the end of this tutorial, a participant should be able to explain the operation of diffusion, and cryo pumped systems; understand how materials are chosen for use in vacuum, and how to rough pump water vapor without producing condensation.

Topical Outline:

  • Introduction
  • Rotary mechanical pumps
  • Diffusion pumps and systems
  • Cryogenic pumps and systems
  • Materials suitable for vacuum use
  • Methods for rough pumping water vapor.

Attendees in this tutorial receive the text, A User’s Guide to Vacuum Technology, 3rd edition, John O’Hanlon (John Wiley & Sons, 2003).

Course Details:

Introduction

This module is designed to ensure that all participants have the same starting knowledge, basic definitions, and descriptive terms used in vacuum technology.

  • Define a gas
  • Define pressure
  • Describe components of an atmospheric and a vacuum gas
  • Describe basic vacuum applications
  • Outline the functions of each component in a system
  • Review questions and summary of answers

 

Rotary Mechanical Pumps

This module covers the construction, characteristics, operating principles, and applications of the following low-rotational speed mechanical pumps:

  • Rotary vane pumps and gas ballast
  • Piston pump
  • Roots and Claw pumps
  • Claw pump
  • Screw. Scroll, and Diaphragm pumps
  • Review and Summary

 

Diffusion Pump Systems

This module first covers the construction, characteristics and operating principles of the diffusion pump. After these concepts are described, the construction and operating principles of a typical diffusion pumped system are covered.

  • Diffusion pump construction and operating principle
  • Backstreaming, Baffles and Traps
  • Starting, cycling and stopping a diffusion pump system
  • Preventing contamination from oil migrating from pumps to chamber
  • Preventive maintenance issues
  • Review and Summary

 

Cryopump Systems

This module first covers the construction, characteristics and operating principles of the cryo pump. After these concepts are described, the construction and operating principles of a typical cryo pumped system are covered.

  • Pump Construction
  • Cryocondensation and Cryosorption Pumping
  • Pumping Arrays
  • Refrigerator Operation
  • Starting, Cycling, and Stopping a Helium Cryo Pump
  • Regeneration and Maintenance
  • Review and Summary

 

Materials in Vacuum

The properties of the materials used within vacuum environments are central to the proper construction and performance of large systems. This module describes fundamental, important properties of common materials used in a vacuum environment.

  • Metals
  • Glasses and Ceramics
  • Polymers and Elastomers
  • Cleaning and Outgassing
  • Review and Summary

 

Rough Pumping Large Systems

Most practical production systems today are designed for a specific application. Because of their size, roughing systems are no longer simple. This module describes roughing techniques for several kinds of vacuum pumping systems and applications.

  • Preventing water aerosol formation
  • Preventing particle formation
  • Crossover to a Diffusion Pump
  • Crossover to a Turbo Pump
  • Crossover to a Cryo Pump
  • Review and Summary

Instructor: John F. O’Hanlon, Professor Emeritus of Electrical and Computer Engineering, University of Arizona
John F. O’Hanlon

is Professor Emeritus of Electrical and Computer Engineering, the University of Arizona. He retired from IBM Research Division in 1987, where he was involved in thin-film deposition, vacuum processing, and display technology. He retired from UA in 2002, where he directed the NSF Ind./Univ. Center for Microcontamination Control. His research focused on particles in plasmas, cleanrooms, and ultrapure water contamination. He is the author of A User’s Guide to Vacuum Technology, 3rd edition. (John Wiley & Sons, 2003).


This course is currently available via:
On Location Education Program

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