Large Area Coating

Large Area Coating
Moderator: Michael Andreasen, NxEdge, Inc.

9:30 a.m. L-1 A Multidisciplinary Approach Towards Advanced Transparent Conductive Electrodes
B. Szyszka, Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany; A. Gombert, Fraunhofer Institute for Solar Energy Systems (ISE), Freiburg, Germany; P. Loebmann, Fraunhofer Institute for Silicate Research (ISC), Wuerzburg, Germany; C. May, Fraunhofer Institute for Photonic Microsystems (IPMS), Dresden, Germany; and C. Elsaesser, Fraunhofer Institute for Mechanics of Materials (IWM), Freiburg, Germany

9:50 a.m. L-2 Optimizing Magnetron Configuration to Sputter Thicker Rotatable Cylindrical Targets
M. Devine, Dexter Magnetic Technologies, Inc., Hicksville, NY; M. Asbas and G. Laverriere, Soleras, Ltd., Biddeford, ME; and M. Schilling, Dexter Magnetic Technologies, Inc., Hicksville, NY

10:10 a.m. L-3 Comparisons of Planar and Cylindrical Magnetrons Operating in Pulsed DC and AC Modes
P.J. Kelly and G. West, Manchester Metropolitan University, Manchester, United Kingdom; Q. Badey, National Polytechnic Institute of Industrial and Chemical Engineering, Toulouse, France; and J.W. Bradley, I. Swindells, and G.C.B. Clarke, University of Liverpool, Liverpool, United Kingdom

10:30 a.m. L-4 Advanced Linear Ion Source for Surface Modification in Large Area Vacuum Deposition Processes
P. Morse, M. George, J.E. Madocks, and J. Morris, General Plasma, Inc., Tucson, AZ

10:50 a.m. L-5 The Impact of the Recent US Supreme Court Decisions and New US Patent and Trademark Office Rules on Patent Acquisition, Exploitation, Enforcement and Defense Strategies
Invited 40 min. Talk
M.M. Zoltick, Esq., J.A. Hynds, Esq., and D.V. Sclatrito, Ph.D., Rothwell, Figg, Ernst and Manbeck, P.C., Washington, DC

11:30 a.m. L-6 Investigation of Transparent Conductive Silver Based De-Icing Coatings for Automotive Application
R. Nyderle, T. Preussner and T. Kopte, Fraunhofer-Institut for Electronenstrahl-und Plasmatechnik (FEP), Dresden, Germany

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Tuesday Morning, April 22

Large Area Coating
Moderator: Johannes Strümpfel, VON ARDENNE Anlagentechnik GmbH, Germany

8:30 a.m. L-7 Practical Measurements of Film Thickness Uniformity
P. Greene and S. Nadel, Applied Materials, Fairfield, CA

8:50 a.m. L-8 Flexible Large Area Production of Optical Multilayer Stacks on Metal Strips
C. Deus, H. Obst, and D. Schulze, VON ARDENNE Anlagentechnik GmbH, Dresden, Germany

9:10 a.m. L-9 High Performing, Flexible and Comprehensive Rotating Cylindrical Sputter Hardware Solutions
A. Blondeel, I. Van de Putte, and W. De Bosscher, Bekaert Advanced Coatings N.V., Deinze, Belguim

9:30 a.m. L-10 Comparison of Mid Frequency and Bipolar Pulsed DC Power Supplies for Dual Magnetron Sputtering
D. Ochs, HÜTTINGER Electronik, Freiburg, Germany; P. Ozimek and A. Klimczak, HUETTINGER Electronic Sp z o.o., Zielonka, Poland; and T. Rettich, HUETTINGER Electronik, Freiburg, Germany

9:50 a.m. L-11 New Developments of Plasma Activated High-Rate Electron Beam Evaporation for Large Surfaces
C. Metzner, H. Morgner, J.P. Heinss, and B. Scheffel, Fraunhofer-Institut fuer Elektronenstrahl- und Plasmatechnik (FEP), Dresden, Germany

10:30 a.m. L-12 Defect Counting and Analysis System for Large Area Coating Operations
R. Allen, Thin Film Services, West Bath, ME

10:50 a.m. L-13 Issues and Solutions for Dealing with a Highly Capacitive Transmission Cable
F.N. Morgan and K.C. Cameron, Advanced Energy Industries, Inc., Fort Collins, CO

11:10 a.m. L-14 Arc Prevention in Magnetron Sputtering Processes
D. Carter, Advanced Energy Industries, Fort Collins, CO

11:30 a.m. L-15 Optical and XRR Methods for Analysis and Design of Low-E Coatings and PDP Filters
S. Ulrich, A. Pflug, and B. Szyszka, Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany

Preliminary Program Index