Decorative and Functional Coating

Decorative PVD Hardcoatings in a Wide Colour Range on Different Substrate Materials [6]
W. Fleischer, T. Trinh, G.J. van der Kolk, T. Hurkmans and M. Franck, Hauzer Techno Coating Europe B.V.,
The Netherlands.....33

Lower Cost PVD Enlarge the Marketplace [7]
B. Garside and J. Housden, Tecvac Limited, United Kingdom.....38

Coating Evaluations of Decorative PVD Finishes [8]
G.J. van der Kolk, T. Hurkmans, T. Trinh and W. Fleischer, Hauzer Techno Coating Europe B.V., The Netherlands;
and M. Griepentrog and U. Beck, Federal Institute for Materials Research and Testing, Germany.....44

CVD, PVD—One System Does It All! [9]
B. Lee and Y. Liu, Vacuum Plating Technology Corp......51

New Short Cycle Coating Technology for Decorative Hard Coating of Large Volume [10]
D. Hofmann, H. Maidhof and H. Schüssler, Leybold Systems GmbH, Germany.....55

Commercial Applications Using Non-Hydrogenated Carbon Films for Industrial Uses Such as Cutting Tools and Wear Components [11]
R.H. Horsfall, TetraBond Division, Multi-Arc Inc......60

Processing, Properties and Performance of High Volume Sputter Deposited Boron-Carbon Coatings [12]
W. Cermignani and M.G. Robinson, Diamond Black Technologies, Inc.; and T. Hu, L. Stiehl, W. Rafaniello,
T. Fawcett, P. Marshall and S. Rozeveld, The Dow Chemical Company.....66

High Performance Me-DLC Coatings for Precision Components [13]
K. Bewilogua, M. Grischke, J. Schröder, C. Specht and T. Michler, Fraunhofer-Institut für Schicht-und Oberflächentechnik, Germany; and G. J. van der Kolk, T. Trinh, T. Hurkmans and W. Fleischer, Hauzer Techno Coating Europe B.V., The Netherlands.....75

PVD-Coatings for Dry Cutting of Al-alloy and Bronze [14]
W. Fleischer and M. Franck, Hauzer Coating Centrum B.V., The Netherlands; G.J. van der Kolk, T. Trinh and T. Hurkmans, Hauzer Techno Coating Europe B.V., The Netherlands; F. Klocke and G. Eisenblätter, WZL, RWTH, Germany; W. Hockauf, Robert Bosch GmbH, Germany; and C. Sanz, Tekniker, Spain.....80

Morphologies of Diamond-Containing Carbon Thin Films Prepared by Magnetron Sputtering [15]
Z. Daming and L. Jiajun, Tribology Research Institute, Tsinghua University, China; and J. Fengming and H. Jiqun, Surface Engineering Institute, ANC Ion Coating Co......89

Low Temperature Deposition of Functional Coatings in a High Density Plasma [16]
F. Li, C.-T. Lin and T. D. Mantei, Department of Electrical & Computer Engineering and Computer Science,
University of Cincinnati.....94

Vacuum Metallizing Plastic Parts for Five Decades—What Progress Have We Made? [17]
H. Grünwald, D. Fuchs and R. Kucharzewski, Leybold Systems GmbH, Germany; and J. Snyder, Leybold Technologies, Inc......98

Emerging Technologies

Advances in Plasma Deposition of Optical Films and Coatings [18]
L. Martinu, Groupe des Couches Minces (GCM) and Department of Engineering, Physics and Materials Science, École Polytechnique Montréal, Canada.....111

Transparent Barrier Coatings on PET by Single- and Dual-Frequency PECVD [19]
A.S. da Silva Sobrinho, École Polytechnique Montréal, Canada; M. Latrèche and G. Czeremuszkin, Polyplasma Inc., Canada; and J.E. Klemberg-Sapieha and M.R. Wertheimer, École Polytechnique Montréal, Canada.....115

Interphase Characterization of PECVD Silicon-Compound Layers on PET [20]
A.S. da Silva Sobrinho, A. Bergeron, N. Schühler, J.E. Klemberg-Sapieha, L. Martinu and M.R. Wertheimer, Groupe des Couches Minces (GCM) and Department of Engineering Physics, Ecole Polytechnique Montréal, Canada; and M. Andrews, Department of Chemistry, McGill University, Canada.....121

Structure Modification by "In-Situ Mechanical Working" [21]
S.B. Dodd, R.C. Piller and S. Morris, Structural Materials Centre, Defence Evaluation and Research Agency (DERA), United Kingdom.....127

Synthesis and Characterization of Polyimide Thin Coatings Deposited by Means of a Standard
RF-Magnetron Sputtering Equipment [22]
G. Maggioni and C. Santini, Thin Films srl, Italy; and S. Carturan and V. Rigato, INFN Laboratori Nazionali di Legnaro, Italy.....133

Characterization of Hydrophobic Thin Films Prepared Using a Cold Cathode Ion Source and Plasma Deposition [23]
J.E. Klemberg-Sapieha and L. Martinu, Groupe des Couches Minces (GCM) and Engineering Physics Department, École Polytechnique Montréal, Canada; and V. Fridman and D.E. Morton, Denton Vacuum, Inc......138

Fullerene Electrochromism Under High Pulsed Fields [24]
G. Konesky.....144

Combined Control Techniques for Reactive Sputtering of Wear/Abrasion Resistant TiN, Cr2N, CrN and AlN Films on Compliant and/or Temperature Sensitive Substrates [25]
M.L. Kuruppu, Multi-Arc Scientific Coatings; G. Negrea, Technical University of Cluj-Napoa, Romania; and
S. Kirkpatrick, D. Mihut and S.L. Rohde, Department of Mechanical Engineering, University of Nebraska.....147

Large Area Coatings

Coating Methods for Large Area, Highly Electromagnetic-Attenuating Micromesh Filter Providing
Minimally Obtrusive Visual Effects for Flat Panel Display Screen [26]
K. Ramsey, R. Ridgway, J. Laudo, G. Ruck and R. Gorenflo, Battelle.....155

Sputtering of ITO from a Rotating Ceramic Target [27]
K.P. Gibbons, BOC Coating Technology; C. K. Carniglia, OCLI; and R.E. Laird, EMF Corporation.....159

New Layer System Family for Architectural Glass Based on Dual Twin-Magnetron Sputtered TiO₂ [28]
H. Schilling, J. Szczyrbowski, M. Ruske and W. Lenz, Leybold Systems GmbH, Germany.....165

Typical Substrate Problems Encountered in Large Area Flat Glass Coating Operations [29]
P.J. Lingle and J.R. Rancourt, Guardian Industries Corporation.....174

High-Rate Sputter Deposition of TiO₂ Using Closed-Loop Feedback Control [30]
K.P. Gibbons, R.E. Laird and C. K. Carniglia, BOC Coating Technology.....178

New Application of Medium Frequency Sputtering for Large Area Coating [31]
T. Rettich and P. Wiedemuth, Hüttinger Elektronik GmbH + Co. KG, Germany.....182

New Developments in the Field of MF-Sputtering with Dual Magnetron to Obtain Higher Productivity for Large Area Coatings [32]
U. Heister, J. Krempel-Hesse, J. Szczyrbowski and G. Bräuer, Leybold Systems GmbH, Germany.....187

Counter-Rotating Planetary Design for Large Rectangular Substrates [33]
D.J. Smith and A. Staley, Laboratory for Laser Energetics, University of Rochester; R. Eriksson and G. Algar, Vacuum Process Technology.....193

Large Area Deposition by Mid-Frequency AC Sputtering [34]
R. Hill, S. Nadel and P. Petrach, BOC Coating Technology.....197

Optical Coating

Stability and Repeatability of Two-Layer Anti-Reflection Coatings [35]
I.C. Stevenson, P.R. Denton, G. Sadkhin and V. Fridman, Denton Vacuum, LLC.....205

Multilayer Absorber/Emitter Coatings for Infrared Fiber Optic Displays [36]
P.M. Martin, J.W. Johnston, D.C. Stewart and W.D. Bennett, Battelle Pacific Northwest National Laboratory; and
R.Z. Dalbey, Naval Air Warfare Center.....212

High-Performance Filters for Dense Wavelength-Division-Multiplex Fiber Optic Communications [37]
J.J. Pan, F.Q. Zhou and M. Zhou, E-TEK Dynamics, Inc......217

Molecularly Doped Polymer Composite Films for Light Emitting Polymer Applications Fabricated by the PML Process [38]
J.D. Affinito, M. Shi, S. Stockhause, M.E. Gross and P.A. Mounier, Battelle Pacific Northwest National Laboratory.....220

Synthesis of Carbon Nitride, Silicon Dioxide and Silicon Nitride by Electron Cyclotron Resonance Chemical Vapor Deposition [39]
M.B. Moran and L.F. Johnson, Naval Air Warfare Center.....226

Conductive Infrared-Transparent Intermetallic Boride, Carbide and Oxide Coatings [40]
L.F. Johnson, M.B. Moran and T.L. Cole, Research and Technology Group, Naval Air Warfare Center.....232

Thin Layer Surface Resonators: A New Spectroscopic Tool for Probing Dielectric Film Structure and Properties [41]
Z. Salamon and G. Tollin, Department of Biochemistry, University of Arizona; H.A. Macleod, Thin Film Center, Inc.; and I.C. Stevenson, Denton Vacuum, Inc......238

A Comparative Study of the Stability of Hard Oxide Coatings Produced With and Without Ion Assist [42]
H. Zorc, Omega Optical, Inc., and Rudjer Boskovic Institute, Croatia; and K. Snowdon, R. L. Johnson, Jr. and S. E. Morin, Omega Optical, Inc......243

Film Thickness of "Thick Thin Films" by Spectroscopy [43]
F. Goldstein, FTG Software Associates.....248

Stepped Infrared Multi-Band Filters [44]
N.S. Gluck, W.R. Hammond and R.L. Hall, Rockwell Science Center.....253

Beyond the Critical Angle [45]
H.A. Macleod and C. Clark, Thin Film Center, Inc......257

Index of Refraction versus Oxygen Partial Pressure from Tantalum Oxide and Silicon Oxide Films Produced by Ion Beam Deposition [46]
W.D. Goward, H.E. Petersen, S.P. Dijaili and J.D. Walker, Lawrence Livermore National Laboratory.....263

Mass Production of Anti-Reflex Film System [47]
D. Beisenherz, G. Bräuer, J. Szczyrbowski and G. Teschner, Leybold Systems GmbH, Germany.....266

Yield Enhancements in Optical Coating Through Integrated Specifications [48]
S.E. Morin and R.L. Johnson, Jr., Omega Optical Inc......270

Ion Assistance of High-Rate EB-PVD Processes for Deposition of Aluminum Strips by Reflection Increasing Layer Systems [49]
E. Reinhold, O. Gawer, J. Richter and J. Strümpfel, Von Ardenne Anlagentechnik GMBH, Germany.....275

Optimizing Source Location for Control of Thickness Uniformity [50]
I.C. Stevenson, Denton Vacuum, LLC.....281

Correlation Between Optical and Mechanical Properties of Ion Plated Ta₂O5 Films [52]
W. Lechner, G.N. Strauss and H.K. Pulker, Institute of Experimental Physics, University of Innsbruck, Austria.....287

Process Design Issues for Rugate Coating Fabrication [52]
J.E. Lazo-Wasem and T.D. Rahmlow, Jr., Rugate Technologies, Inc......291

Measurement and Correlation of Ion Beam Current Density to Moisture Stability of Oxide Film Stacks Fabricated by Cold Cathode Ion Assisted Deposition [53]
D.E. Morton and V. Fridman, Denton Vacuum, LLC.....297

Designing Optical Coatings with Metal and Dielectric Materials [54]
R.R. Willey, Raytheon Optical Systems, Inc......303

Non-Radioactive IR Anti-Reflective Coating [55]
G. Doubinina, B. Poirier, E. Strouse and J. Cerino, Raytheon Optical Systems, Inc......310

Plasma Processing

PECVD by Hollow Cathodes [56]
L Bárdos, H. Baránková and S. Berg, Ångström Laboratory, Uppsala University, Sweden.....315

Electrical Dynamics of Pulsed Plasmas [57]
A. Belkind and A. Freilich, Stevens Institute of Technology; and R. Scholl, Advanced Energy Industries.....321

Gas Phase and Particle Diagnostic of HMDSO Plasmas by Infrared Absorption Spectroscopy [58]
C. Courteille, D. Magni, C. Deschenaux, A.A. Howling and C. Hollenstein, Centre de Recherches en Physique des Plasmas, Ecole Polytechnique Fédérale de Lausanne, Switzerland; and P. Fayet, Tetra Pak (Suisse) SA,Switzerland.....327

Physicochemical Behaviour at the Plasma-Polymer Interface [59]
S.H. Wheale, C.P. Barker and J.P.S. Badyal, Department of Chemistry, Science Laboratories, Durham University, United Kingdom.....333

Effect of Pulse Mode on the Plasma Characteristics and on the Treatment of Polymers [60]
O. Zabeida, J.E. Klemberg-Sapieha and L. Martinu, Groupe des Couches Minces (GCM) and Engineering Physics Department, École Polytechnique Montréal, Canada.....336

Vacuum Web Coating

Cold Gas Plasma Treatment of Films, Webs, and Fabrics [61]
S.L. Kaplan, 4th State, Inc......345

Influence of Polymer Film Surfaces on Adhesion and Permeation Properties of Vacuum Web Coated High Barrier Films and Laminates: Results of a Cooperative Research Project [62]
Ch. Bichler, K. Mayer, H.-C. Langowski and U. Moosheimer, Fraunhofer Institute for Process Engineering and Packaging, Germany.....349

Surface Functionalization of Polymer Films and Webs Using Subatmospheric Plasmas [63]
W. Decker and A. Yializis, Sigma Technologies International, Inc......355

Plasma Treatment of PET for Improving Al-Adhesion [64]
R. d’Agostino, R. Lamendola, G. Tenuto and M. Creatore, Department of Chemistry, University of Bari, Italy.....358

Research of Processes and Devices for Plasma Treatment of Polymeric Films Before Vacuum Coating [65]
Y. Lipin and R. Zeilja, J/S Co. Sidrabe, Latvia; O. Aksenov, Institute of Electrical Insulating Materials, Latvia;
M. Kabaev, Lithuanian Textile Institute, Lithuania; and V. Snika, Technological University, RC Vibrotechnika, Lithuania.....361

Metallized Label Paper—A Hi-Tec Product [66]
A.N. Ainscough, Van Leer Metallized Products Ltd., United Kingdom.....366

Oxide Coating on Plastic Film [67]
N. Schiller, H. Morgner, N. Neumann, M. Krug and S. Straach, Fraunhofer Institut Elektronenstrahl-und Plasmatechnik, Germany.....370

Transparent/Conducting TiO₂-Based Coatings for Space Applications [68]
S. M. Gajdos, A. J. Adorjan, A. I. Jalics and P. D. Hambourger, Cleveland State University; J. A. Dever, NASA Lewis Research Center; P. Lippens and H. Lievens, Innovative Sputtering Technology N.V., Belgium; and A. Taylor and D. Lievens, I.S.T. North America.....374

Low Temperature Deposition of High Quality Tantalum Oxide onto Polyimide Substrates [69]
M.C. Nielsen, J.-Y. Kim, E.J. Rymaszewski and T.-M. Lu, Center for Integrated Electronics and Electronic Manufacturing, Rensselaer Polytechnic Institute; and N. Krishnamurthy, K.M. Durocher, R.J. Saia and H.S. Cole, General Electric Corporate Research and Development Center.....378

Porous Transition Metal Oxides on Polymeric Substrates [70]
F.E. Woodard and L.C. Peck, Southwall Technologies Inc......385

Characterization of Optical Coatings for Holographic Applications [71]
N.A.G. Ahmed and G. Ellis, General Vacuum Equipment Ltd., United Kingdom.....388

On-Line Evaluation of Web Coatings for Color Applications [72]
M. Nofi and J. Matteucci, Flex Products, Inc......392

High Rate Stable Reactive Sputtering Onto Large Plane Substrates by Successive Pulse Plasma Anodization (SPPA) [73]
R.P. Howson and N. Danson, Dept. of Physics, Loughborough University, United Kingdom.....397

Latest Advancements in Aluminium Metallizing of Packaging and Functional Films [74]
A. Carletti and F. Rimediotti, Galileo Vacuum Systems, Italy.....401

Wrinkling of Thin Webs [75]
D.R. Roisum, Finishing Technologies, Inc......406

Web Coating Dynamic Thermal and Wrinkling Model [76]
M.J. McCann, McCann-Science; and D.P. Jones, ICI Films, United Kingdom.....412

Retro-Reflective Laser Inspection for Defect Detection and Optical Quality [77]
T.A. Potts, Dark Field Technologies, Inc......418

Transparent Barrier Coatings by Electron Beam Evaporation—An Update [78]
P. Seserko, G. Löbig, R. Ludwig, R. Kukla, G. Hoffmann and G. Steiniger, Leybold Systems GmbH, Germany.....424

Durability of Thin PECVD SiO_X Coatings on Polymer Films [79]
Y. Leterrier and J.-A. E. Månson, Laboratoire de Technologie des Composites et Polymères, Ecole Polytechnique Fédérale de Lausanne, Switzerland; and G. Rochat and P. Fayet, Tetra Pak (Suisse) SA, Tetra Pak Materials R&D, Switzerland.....429

Microstructural Characterisation of Transparent Silicon Oxide Permeation Barrier Coatings on PET [80]
B.M. Henry, A.P. Roberts, C.R.M. Grovenor, A.P. Sutton and G.A.D. Briggs, University of Oxford, United Kingdom; Y. Tsukahara, M. Yanaka, and T. Miyamoto, Toppan Printing Co., Ltd., Japan; and R.J. Chater, Imperial College of Science, Technology & Medicine, United Kingdom.....434

Metalization: An End-User’s Perspective [81]
J. Specht, Frito-Lay, Inc......440

USDC and the National Technology Roadmap for Flat Panel Displays [82]
J.N. Bardsley, United States Display Consortium.....446

Roll-to-Roll Coating of Indium Tin Oxide—A Status Report [83]
R.L. Cormia, Southwall Technologies; J.B. Fenn Jr., NeoVac; H. Memarian, Courtaulds Performance Films;
and G. Ringer, Dynapro Thin Film Products.....452

Metallized Films for Capacitor Applications [84]
A. Yializis, Sigma Technologies International, Inc.; and P. Raugei, Galileo Vacuum Systems, Inc......458

Roll-to-Roll Sputter Web Coater—A Status Report [85]
J.B. Fenn Jr. and W.C. Kittler Jr., Neovac; D. Lievens, Innovative Sputtering Technology; R. Ludwig, Leybold Systems, Germany; G. Phillips, Material Science Corp.; and A. Taylor, Innovative Sputtering Technology.....463

A Review of Developments in Metallizing Machine Technology [86]
R. Mitchell, Celplast Metallized Products Limited, Canada; A. Broomfield, General Vacuum Equipment; E. Josephson, Leybold Technologies, Inc.; G. Lobig, Leybold Systems GmbH, Germany; and P. Raugei, Galileo Vacuum Systems, Inc......472

Advances in Functionalized Acrylate Polymers for a New Variety of Web Coating Applications [87]
A. Yializis, M.G. Mikhael, T. A.Miller, A. Boufelfel and R. E. Ellwanger, Sigma Technologies International, Inc......477

Vendor Session

The Importance of Magnets for Vacuum Coating [88]
J. Foy and G.-L. Wang, Dexter Magnetic Technologies.....485

Goodfellow—Metals and Materials for Research and Development [89]
S.C. Aldersley, Goodfellow Corporation.....486

Fabricating Target Materials by Pneumatic Isostatic Forging—A New Technology [90]
T.W. Reddoch, Ametek, Inc......488

Recent Developments in the Underbalanced Closed Field Sputtering System [91]
G. Chester, D. Teer and K. Laing, Teer Coatings Ltd., United Kingdom.....491

Production System for Narrow Band Filters Used in Fiber Optics Communication [92]
R. Faber, Leybold Systems GmbH, Germany.....492

Cone of Incidence, Polarization, Spectral Bandwidth, and Other Disturbers of Coating Performance [93]
C. Clark and H.A. Macleod, Thin Film Center, Inc......493

GBROR™ Gas Box Rate of Rise In Situ Flow Verifier [94]
P. Blackborow and D. Lavallee, MKS Instruments, Inc......494

Emerging Markets for Vacuum Coatings [95]
K. Legg and H. Solnick-Legg, Rowan Catalyst, Inc......495

The SLC-Technology for Chromelike Surfaces—A New Process Combining Powder Painting with Physical Vapor Deposition for Automotive Wheels [96]
H.M. Gabriel and T. Schwing, Durovib Oberflächentechnik GmbH, Germany.....496

New Opportunities in Car Lighting Manufacture by Plasma Polymerization in the Multi Chamber Sputtering System "Dynamet" [97]
H. Grünwald, W. Dicken and S. Kunkel, K. Nauenburg, Leybold Systems GmbH, Germany.....498

Developmental Thin-Film Vacuum Web Coater [98]
K.W. Dick and D.G. Smith, Rexam Custom.....501

Treatmag, a New Tool for Inline Plasma Pre-Treatment in Web Coaters for Packaging Applicaitons [99]
G. Löbig, R. Ludwig, P. Seserko and G. Steiniger, Leybold Systems GmbH, Germany.....502

esseCI Polarized Flame Treatment: New Improvement [100]
P. Mandoloni, esseCI s.r.l., Italy.....504

Hostaphan RHB 12, a New PET-Film for Ultra High Barrier After Coating with Vacuum Deposited Layers [101]
R. Davis and H. Peiffer, Hoechst Diafoil GmbH, Germany.....505

New, Innovative Turbomolecular Pump Designed for Coating Applications [102]
J. Fabrizio and L. Wages, Leybold Vacuum Products. Inc......507

The PFC-330 in Chamber Water Vapor Cryopump [103]
D. LaCourt and P. Hall, IGC-Polycold Systems Inc......509

Advances in Manufacturing Equipment for Large Area Processing [104]
P. Bhat, MRG, LLC.....513