1997 40th Technical Conference Proceedings

Note: Number in brackets on the top line is the paper number for 1997.

Plenary Session

SVC - Past, Present, and Future.... the Society and the Industry [1]
H.A. Macleod, Thin Film Center, Inc......3

Process Control and Instrumentation

Novel Application of a Crystal Process Controller and DOE to Improve Metallizing Results [2]
R.R. Willey, LexaLite Scientific Center.....9

Adapting Statistical Process Control Methods [3]
L.D. Morton, L. Kerber and D. Bui, Applied Films Corporation.....14

Progress in Monitoring and Control of Reactively Sputtered ITO Using Optical Emission and Mass Spectroscopy [4]
H. Patel, M. Saif and H. Memarian, Courtaulds Performance Films.....20

Upscaling Multilayer Applications in a PVD-Coating System [5]
T. Leyendecker, G. Erkens and S. Esser, CemeCon GmbH, Germany.....24

Hot Forging of Precious Metal Sputtering Targets For Improved Performance [6]
H.L. Grohman, C.J. Massing and H. Lichtenberger, Williams Advanced Materials.....29

Decorative and Functional Coating

Development of a Fast Cycle Coater [7]
J.A. Carlotto, Tanury Industries, Inc......37

An Inorganic Polymer Protective Finish [8]
R.J. Dykhouse and J.R. Dykhouse, MetroLine Surfaces, Inc.; and T. Hu and P.J. O'Connor,
The Dow Chemical Company.....40

Rapid, High-Quality Metallization of Plastic Parts [9]
H. Grünwald, J. Henrich, J. Krempel-Hesse, W. Dicken, S. Kunkel and G. Ickes, Leybold Systems
GmbH, Germany; and J. Snyder, Leybold Technologies Inc......44

Zero-Waste Dry Plating [10]
M. Sunthankar and S.D. Joshi, IonEdge Corporation.....49

Rapid Cycle Coating Techniques for Cell Manufacturing [11]
G. Vergason and A. Papa, Vergason Technology, Inc......54

Corrosion Performance and Structure of the Titanium-Based Coatings Deposited onto Stainless Steel Substrate with Arc Plating [12]
S. Rudenja, P. Kulu, E. Talimets, and V. Mikli, Tallinn Technical University, Estonia; F. Erikhov,
Dvigatel Ltd., Estonia; and C.A. Straede and T. Zwieg, DTI Industry, Denmark.....58

Combinatorial Barrier Effect of the Multilayer SiOx Coatings on Polymer Substrates [13]
Y.G. Tropsha and N.G. Harvey, Becton Dickinson Research Center.....64

Properties and Practical Applications of MoS₂ / Metal Composite Coatings [14]
D.G. Teer, J. Hampshire, V. Fox, K. Laing, Teer Coatings Ltd., United Kingdom; and
V. Bellido-Gonzales, Gencoa, United Kingdom .....70

Structure, Properties and Applications for PVD Al₂O₃ Layers - A Comparison of Deposition Technologies [15]
G. Hoetzsch, O. Zywitzki and H. Sahm, Fraunhofer-Institut für Elektronenstrahl - und Plasmatechnik,
Germany.....77

Diamond-Like Nanocomposites: A New Class of Coatings for Low-Wear and Low-Friction Applications [16]
D. Neerinck, P. Persoone and M. Sercu, Bekaert Corporate Research Center, Belgium; A. Goel, C. Venkatraman, D. Kester, C. Halter, P. Swab and D. Bray, Advanced Refractory Technologies, Inc......86

TiAlN Based PVD Coatings Tailored for Dry Cutting Operations [17]
W.D. Münz, I.J. Smith and L.A. Donohue, Materials Research Institute, Sheffield Hallam University,
United Kingdom; A.P. Deeming, Hydra Tools International plc, United Kingdom; and R. Goodwin,
Dormer Tools Limited, United Kingdom.....89

Properties of Metal-Containing Carbon (Me-C:H) Films [18]
G.J. van der Kolk, T. Hurkmans, T. Trinh and W. Fleischer, Hauzer Techno Coating, The Netherlands.....94

Hard-Soft: A New Age of Industrial Coatings [19]
R. Ferguson, Platit AG, Germany; J. Rechberger, Vilab AG, Germany; and H. Curtins and R. Dubach,
Platit AG, Germany.....99

Emerging Technologies

The Historical Development of Controlled Ion-assisted and Plasma-assisted PVD Processes [20]
D.M. Mattox, Management Plus, Inc......109

Reactive Deposition by the Linear Arc Discharge (LAD) Plasma Source [21]
H. Baránková, L Bárdos and S. Berg, Uppsala University, Sweden.....119

Reactive Deposition of Insulating Layers by Means of an LE-UCCIS (Low Energy - Universal Cold Cathode Ion Source) [22]
G.A. Garzino-Demo and F.L. Lama, Braink A.G., Liechtenstein.....124

Advanced Possibilities for the Stationary Coating of Substrates by Means of Pulsed Magnetron Sputtering [23]
S. Schiller, V. Kirchoff, K. Goedicke and P. Frach, Fraunhofer-Institut für Elektronenstrahl-und
Plasmatechnik (FEP), Germany.....129

High Power Generators for Medium Frequency Sputtering Applications [24]
T. Rettich and P. Wiedemuth, Hüttinger Elektronik GmbH, Germany.....135

The Industrial Establishment of a Highly Productive Deposition Technique for Reflection Increasing Layer Systems [25]
E. Reinhold, C. Melde and J. Strümpfel, Von Ardenne Anlagentechnik GmbH, Germany.....139

Filter Arc Deposition Fast and Superior Coating [26]
D. Molenda, J.T. Grembowicz, A. Ginovker and O. Popow, Chessen Group, Canada.....143

Novel Bulk Alloy Production by High Rate Electron Beam Evaporation [27]
S.B. Dodd and S. Morris, Structural Materials Centre, United Kingdom.....145

Large Area Coatings

Deposition of Field Emission Cathodes Over Large Areas [28]
A.F. Jankowski and J.P. Hayes, University of California, Lawrence Livermore National Laboratory.....153

Enhanced Surface Properties of Metallic Sheets by High-Rate Electron Beam Evaporation [29]
J.P. Heinss, K. Goedicke, G. Hoetzsch, C. Metzner and B. Scheffel, Fraunhofer-Institut für
Elektronenstrahl-und Plasmatechnik, Germany.....157

Optical Coatings Used in LCD Projection [30]
Y.G. Zhang, P.F. Gu, H.F. Li, X. Liu, J.F. Tang and J. Wang, Zhejiang University, China.....164

Special Features of the Pulsed Magnetron Sputter Technology for Glass Coaters [31]
S. Schiller, V. Kirchoff, T. Kopte and M. Schulze, Fraunhofer-Institut für Elektronenstrahl-und
Plasmatechnik, Germany.....168

Peculiarities of Titanium Compound Films Formation on Heat Sensitive Substrates by Electric Arc Vaporization [32]
A. Vovsi and Y. Lipin, J/S Co Sidrabe, Latvia.....174

Reactive Dual Magnetron Sputtering of Oxides for Large Area Production of Optical Multilayers [33]
J. Strümpfel, G. Beister, D. Schulze, M. Kammer and St. Rehn, Von Ardenne Anlagentechnik
GmbH, Germany.....179

Optical Coating

Optical Properties of Magnetron Sputtered Boride, Oxiboride, and Nitriboride Coatings [34]
P.M. Martin, D.C. Stewart and W.D. Bennett, Battelle Pacific Northwest Laboratory; E. Savrun,
Sienna Technologies, Inc.; M.M. Opeka, Naval Surface Warfare Center; and L.F. Johnson, Naval
Air Warfare Center.....187

Carbon-Nitride and Diamond-Like-Carbon Films Synthesized by Electron Cyclotron Resonance Chemical Vapor Deposition [35]
L.F. Johnson and M.B. Moran, Naval Air Warfare Center.....192

Low Pressure Chemical Vapor Deposition (LPCVD) For Optical Coating Applications [36]
H. Li, W.A. Dawson, J. Roose and B.D. Hoppert, Bausch & Lomb Thin Film Technology Division.....198

Ion Assisted Deposition (IAD) of TiO₂, Al₂O₃ and MgF₂ Thin Films Using a High Current/Low Energy Ion Source [37]
D.E. Morton and R. Danielsen, Denton Vacuum, Inc......203

Comparison of Surface Treatments of PET and PML [38]
J.D. Affinito, S. Eufinger, M.E. Gross, G.L Graff, and P.M. Martin, Pacific Northwest National Laboratory.....210

ITO Coatings for Display Applications [39]
K.P. Gibbons, C.K. Carniglia, R. E. Laird, R. Newcomb, J.D. Wolfe and S.W.T. Westra, BOC Coating Technology.....216

Electric Field Distribution as a Tool in Optical Coating Design [40]
H.A. Macleod and C. Clark, Thin Film Center, Inc......221

High-Transparency Thin Films with Tailorable Sheet Resistivity [41]
A.M. Pal, A.J. Adorjan and P.D. Hambourger, Cleveland State University; J.A. Dever, NASA Lewis
Research Center; and H. Fu, Ohio Aerospace Institute.....227

Aluminum Doped Indium Tin Oxide (ITO) Films Prepared by DC Magnetron Sputtering [42]
M. Saif, A. Wrzesinski, H. Patel, H. Memarian and R. Ward, Courtaulds Performance Films.....230

Properties of TiO₂ Layers Prepared by Medium Frequency and DC Reactive Sputtering [43]
J. Szczyrbowski, G. Bräuer, M. Ruske, G. Teschner and A. Zmelty, Leybold Systems GmbH, Germany.....237

MgF₂ Optical Films: Ion-Beam-Assisted Deposition of Magnesium Fluoride in a Conventional Electron Beam Evaporator and the Resulting Film Properties [44]
D.A. Baldwin, J.B. Ramsey and J.E. Miles, Commonwealth Scientific Corporation.....243

Trends in Optical Coating [45]
J. Simpson and K.L. Lewis, Defence Evaluation Research Agency, United Kingdom.....248

X-Ray Fluorescence Measurements on Production LCD Coatings [46]
F. Krannig, Applied Films Corporation.....255

Precision Optical Coatings from Express Ophthalmic Coaters [47]
A.G. Spencer, Applied Vision Limited, United Kingdom.....259

Coating of Large X-Ray Telescope Mirrors [48]
R.E. Hahn, G.T. Johnston and A.J. Longmire, Optical Coating Laboratory, Inc......266

Non-Thoriated AR Coatings for Infrared Substrates [49]
B.J. Reinbolt and D.S. Fisher, Exotic Electro-Optics Inc......270

Errors and Tolerances in Optical Coatings [50]
C. Clark and H.A. Macleod, Thin Film Center, Inc......274

Plasma Ion Assisted Deposition of Medium and High Refractive Index Thin Films [51]
M. Friz, Pigment Division Merck KGaA, Germany; and U.B. Schallenberg and S. Laux, Fraunhofer
Institut für Angewandte Optik und Feinmechanik, Germany.....280

The Ion Beam Sputtering: A Good Way to Improve the Mechanical Properties of Fluoride Coatings [52]
E. Quesnel, B. Rolland, V. Muffato, D. Labroche and J.Y. Robic, LETI-CEA-DOPT-Couches minces
pour l'Optique (CMO), France.....293

Plasma Processing

Alumina-Chromia Coatings Deposited by Reactive Magnetron Sputtering [53]
J.M. Schneider and W.D. Sproul, BIRL, Northwestern University; J. Sellers, ENI-SW; and A. Matthews,
RCSE, Hull University, United Kingdom.....301

Infra-Red Absorption Spectroscopy of SiO₂ Deposition Plasmas [54]
C. Courteille, D. Magni, A.A. Howling, V. Nosenko and C. Hollenstein, Centre de Recherches en
Physique des Plasmas, Ecole Polytechnique Fédérale de Lausanne, Switzerland; and P. Fayet,
Tetre Pak SA, Materials R&D, Switzerland.....304

New High Speed, Low Cost, Roll-to-Roll Antireflectivity Coating Technology [55]
T. Ellison, B. Dotter, M. Izu and S. Ovshinsky, Energy Conversion Devices, Inc......309

New Plant Concept for Manufacture of Scratch-Resistant Polymer Layers [56]
R. Wilberg, M. Falz, B. Bücken, VTD Vakuumtechnik Dresden GmbH, Germany; and H.U. Poll,
St. Schreiter, FZM GmbH, Germany.....314

Plasma Ion Assisted Deposition: An Innovative Technology for High Quality Optical Coatings [57]
R. Götzelmann, A. Zöller, W. Klug, K. Matl and H. Hagedorn, Leybold Systems GmbH, Germany .....320

Vacuum Web Coating

Pulsed Plasma Activated Deposition of Plastic Films [58]
S. Schiller, V. Kirchoff, F. Milde, M. Fahland and N. Schiller, Fraunhofer-Institut Elektronenstrahl-und Plasmatechnik FEP, Germany.....327

DC Magnetron Sputter Deposition of ITO on Polymeric Webs Using Plasma Emission for Process Monitoring and Control [59]
H. Patel, Courtaulds Performance Films.....333

Process Modeling of a Novel Double-Sided Vacuum Web Coating System [60]
M.J. McCann, McCann-Science; and E.R. Cox, ICI Explosives, Automotive Products.....338

Modeling and Identification of Process Parameters for Thermal Evaporation [61]
S. Parthasaranthy, A. Mathur and M. Wilson, Honeywell Technology Center; W. Gilbert, University
of Minnesota; and R. Swisher, K. Barnes and D. Neuburger, Sheldahl, Inc......344

The Influence of Water Content on Temperature Rise in Metallized Polypropylene Films [62]
N.A.G. Ahmed and G.H. Ellis, General Vacuum Equipment Ltd., United Kingdom.....350

Vacuum Web Coating - An Old Technology With a High Potential for the Future [63]
E.O. Dietrich and R. Ludwig, Leybold Systems GmbH, Germany; and E.K. Hartwig, Consultant, Germany.....354

Vacuum Coatings on Polymer Web for the Electronic Industry [64]
T.L. Larsen, Southwall Technologies, Inc......365

Barrier Degradation in Aluminum Metallized Polypropylene Films [65]
A. Yializis, R.E. Ellwanger and J. Harvey, Sigma Labs, Inc......371

DC-Sputtered Anti-Reflection Coatings for Plastic Webs Based on TiOx and NbOx [66]
J.D. Wolfe, BOC Coating Technology.....377

Optical Device of Low Visible Light Transmission and Reflection Used for Solar Control Films [67]
M. Martin and P. Yang, MSC Specialty Films, Inc......382

The Adhesion of Oxygen-Plasma Treated Polymer-Films [68]
S.L. Holton, A.J. Kinloch and J.G. Williams, Imperial College of Science Technology and Medicine,
Department of Mechanical Engineering, United Kingdom; and A.C. Roulin, Tetra Pak Materials,
Switzerland .....386

Deposition of Coatings or Free Foils of Sublimating Metals [69]
E. Yadin, J/S Co. Sidrabe, Latvia.....390

Sputter Deposited Clear Barrier Coatings with Anti-Static Properties [70]
P. Lippens, Innovative Sputtering Technology N.V., Belgium; K. Malfait, UCB Film Sector, Belgium; A. Depuydt and M. Vints,Transpac N.V., Belgium; and H. Lievens, I.S.T. N.V., Belgium.....395

Recent Developments in Metallized Biaxially Oriented Polypropylene Film [71]
M.L. Kullberg, QPF, Inc......400

High-Precision Electron Beam Evaporation for Metallizing of Single Wafers by Means of an Innovative Coating Plant [72]
E. Reinhold, O. Gawer and C. Melde, Von Ardenne Anlagentechnik, GmbH, Germany.....405

Recent Developments in the Manufacture of Polyester Films to Make Them Suitable for Subsequent Vacuum Deposition [73]
J. Newton, ICI Americas Inc......412

Vendor Session

A New Compact Product Line for PVD- and CVD- Thin Film Production [74]
T. Leyendecker, CemeCon GmbH, Germany.....421

Progress in Industrial Manufacturing of Decorative Hard PVD-Coatings for Door and Plumbing Hardware [75]
H.G. Maidhof, H. Schuessler and S. Kunkel, Leybold Systems GmbH, Germany.....425

High Performance Magnets for Vacuum Coating [76]
J. Foy and G-L Wang, Dexter Magnetic Materials Division.....426

Ultrafast Parameters in Optical Coatings [77]
H.A. Macleod and C. Clark, Thin Film Center, Inc......427

Vacuum Coating of Porous and/or Elastomeric Substrate Materials [78]
V. Veruguin, J/S Co. Sidrabe, Latvia.....428

VSD-II: A Program to Calculate Conductances and Gas Flow Rates [79]
R.A. Langley, Oak Ridge Scientific Consultants; and D. Santeler, Donald J. Santeler Associates.....429

Thinking Out of the Box: Single Part Just-In-Time and Small Batch Coating Using Cylindrical Magnetron Sputtering [80]
D.A. Glocker, Isoflux, Inc......430

Arcless Electron Beam Guns [81]
M. LaFrance, Telemark.....433

An Approach to Increased Reliability and Reduced Cost in Vacuum Plumbing [82]
H.I. Foster, Syncro Vac, Inc......435

A New Analytical Technique For Coating Characterization [83]
D.A. Cole and J.C. Hirschman, Evans East.....436

Surface Measurements of Thin Films by Scanning Probe Microscopy [84]
J.T. Thornton, Digital Instruments.....437

Principles of Airless Solvent Degreasing [85]
D.J. Gray and J.P. Schuttert, Serec Corporation.....438

The TOPBEAM-System [86]
R. Ludwig and R. Kukla, Leybold Systems GmbH, Germany.....440

Plasma Assisted Optical Coatings [87]
R. Faber, Leybold Systems GmbH, Germany.....444

A New Sputter Web Coater with Pulsed Magnetron Sputtering Systems - Design Aspects [88]
A. Feuerstein, S. Hauff and H. Laemmermann, AG A. Hering, Germany.....446