1991 34th Technical Conference Proceedings

Note: Number in brackets on the top line is the paper number for 1991.

Plenary Session

Opportunities and Challenges: A Supplier's Vision of the Vacuum Coating Industry in the 90s [1]
H. Heidsieck, E.K. Hartwig and S.R. Reineck, Leybold AG, Germany.....3

Surface Cleaning: Recent Developments and Needs [2]
K.L. Mittal, IBM Corporation.....13

Energy Conservation through Vacuum Coatings [3]
D. Arasteh and S. Selkowitz, Lawrence Berkeley Laboratory.....18

Vacuum Coatings for Document Security [4]
J. Rolfe, Bank of Canada, Canada.....20

Special Session

Overview of Major Vacuum Processes and Systems in Japan [5]
C. Hayashi and N. Yoshihiro, Ulvac Corporation , Japan; and A.H. Plaisted, Soleras, Ltd......29

Process Technology

Automated Application of Silicone Glass Like Coatings for Polycarbonate Headlamp Lenses [6]
S. Mokerji, F. Warchol and J. Scranton, Vacumet, Inc......39

Compliance Coatings for Plastics & Metal [7]
D.S. Davi, Jema-American, Inc......45

Industrial Applications of Decorative Coatings - Principles and Advantages of the Sputter Ion Plating Process [8]
U. Kopacz and S. Schulz, Leybold AG, Germany.....48

A Casebook Study on Conforming to Today's Environmental Regulations [9]
I.S. Goldstein, Providence Metallizing Co., Inc......62

Filiform Corrosion of a Vacuum Metallized Product [10]
R.W. Elliott, Ortech International, Canada

Advances in Deposition Technologies and Systems for Molded Plastic Parts [11]
W. Bialojan, Leybold AG, Germany; and D. Butrymowicz, Leybold Technologies, Inc......65

Vacuum Web Coating

Energy Conservation, the Environment, and Vacuum Metallizing [12]
W.F. Djubek and A.N. Ainscough, Van Leer Metallized Products B.V., Holland.....83

Thin-Film Technology for Solid-State Lithium Batteries Employing Solid Redox Polymerization Cathodes [13]
S.J. Visco, M.M. Doeff and L.C. De Jonghe, Lawrence Berkeley Laboratory.....89

Deficiencies of Standard Microwave Susceptors in Contrast to Patent Pending Membrane Susceptors [14]
G.J. Walters, Advanced Dielectric Technologies, Inc......93

Thickness Effects on Thin Film Gas Barriers: Silicon-Based Coatings [15]
J.T. Felts, Airco Coating Technology.....99

Silicon Oxide Barrier Improvement on Plastic Substrate [16]
C. Misiano, E. Simonetti, P. Cerolini and P. Staffetti, Centro Technologie del Vuoto, Italy; and A. Fusi, Galileo Vacuum Tec SpA, Italy.....105

Double-Sided QLF^® Coatings for Gas Barriers [17]
R.J. Nelson and H. Chatham, Airco Coating Technology.....113

20 Years of Resistance Source Development [18]
I. Watts, I. Watts Consultancy Ltd., United Kingdom.....118

Recent Advances in Source Design in Resistive Evaporation Web Coaters [19]
F. Casey, General Vacuum Equipment, United Kingdom; and A. Broomfield, General Vacuum Equipment.....124

Transparent Glass Barrier Coatings for Flexible Film Packaging [20]
D. Chahroudi, Suntek.....130

Ultra-Thin Film Coating and Coevaporation Techniques for Capacitors [21]
A. Fusi and F. Rimediotti, Galileo Vacuum Tec SpA, Italy; L. Pedocchi and G. Rovinda, Dipartimento Chimica, Italy.....135

A Versatile Capacitor Web Coater with Multiple Source Capability [22]
D.V. Lackey, Jr., General Vacuum Equipment.....145

Air-to-Air Vacuum Web Coating - Suitability and Profitability [23]
E.K. Hartwig, T. Krug, R. Fischer and J. Meinel, Leybold AG, Germany.....152

Understanding the Formation and Properties of Metal/Polymer Interfaces via Spectroscopic Studies of Chemical Bonding [24]
R.W. Burger and L.J. Gerenser, Eastman Kodak Company.....162

Web Temperature Profiles and Thermal Resistance Modeling of Roll Sputtered Copper and Chromium onto Polyimide Webs [25]
K.J. Blackwell and A.R. Knoll, IBM Corporation.....169

Yield Determination of the Thin Film Copper by Simple Bending Test and X-Ray Diffraction [26]
K.J. Blackwell and P.C. Chen, IBM Corporation; and Y. Oshida, Syracuse University.....175

A New High Speed Vapor Deposition Process [27]
D.G. Shaw, Catalina Coatings.....180

High Rate Reactive Sputtering with a New Planar Magnetron [28]
T.G. Krug, S. Beisswenger and R. Kukla, Leybold AG, Germany.....183

The Effects of Process Conditions on the Quality and Deposition Rate of Sputtered ITO Coatings [29]
J. Czukor, W. Kittler, P. Maschwitz and I. Ritchie, Courtaulds Performance Films.....190

Optical Coating

Expert System for Application, Design, and Manufacturing of Optical Coatings [30]
K.H. Guenther, A.J. Gonzalez and H.J. Yoo, University of Central Florida.....199

Broadband Antireflection Coating Design Performance Estimation [31]
R.R. Willey, Opto Mechanik, Inc......205

Optical Thin Film Calculations with the Lucid Spreadsheet [32]
F. Goldstein, FTG Software Associates.....210

Uniformity of Coating Thickness on the Inside of a Rotating Cylinders [33]
A. Musset, Denton Vacuum, Inc......213

Supervisory Control for Optical Coatings [34]
T.P. Foley, M.T. Supple, C.M. Martin and S.M. Carousso, DynaVac.....216

Automatic Optical Monitoring in the Ultraviolet Region (200-400 nm) [35]
P.R. Denton, J.J. Chen, F.T. Zimone and A. Musset, Denton Vacuum, Inc......220

Production of Stable Interference Filters by Low Voltage Reactive Ion Plating [36]
M. Dubs and R. Hora, Balzers AG, Principality of Liechtenstein.....223

All Oxide, Broadband Antireflective Coatings by Reactive Sputter Deposition [37]
S.C. Schulz, Airco Coating Technology.....229

Sputtering and Co-sputtering of Optical Coatings using a C-MAG Rotatable Cylindrical Cathode [38]
A. Belkind, BOC Group Technical Center; J. Felts and M. McBride, Airco Coating Technology.....235

Incompatibility of Microprocessors and Electron Beam Evaporation Equipment [39]
W.E. Rodgers and C.R. Vogel, Eddy Company.....240

Vacuum Technology

Calibration of a Quartz Crystal Microbalance Deposition Rate Monitor by Spectroscopic Techniques [40]
A.R. Knoll, L.J. Matienzo and K.J. Blackwell, IBM Corporation.....247

The Overload Conditions in High Vacuum Pumps [41]
M. Hablanian and K. Caldwell, Varian Vacuum Products.....253

Easily Programmable Six-Axis Vacuum Robot [42]
K.J. Lesker, J.A. Brewer and M. Migliuolo, Kurt J. Lesker Company.....259

Small Coating Systems - A Big Role in the Vacuum Industry [43]
B. Garcia, Temescal.....266

Spectral In Process Multi Point Optical Monitoring for Thin Film Process Control [44]
B. Barney, SC Technology.....271

Care and Feeding of Process Power Supplies [45]
S.M. Simons, Manitou Systems, Inc.; and H.I. Foster, Innotec Group.....277

Compact Disc and Media Technology

Sputtering Technology for Optical Disc Production [46]
G. Strasser and G. Oesterle, Balzers AG, Principality of Liechtenstein; S. Jost and B. Graham, Balzers.....281

Molded Optical Disks Discharged Without Opening the Mold [47]
G. Galic and S. Maus, Galic Maus Ventures.....290

Advances in 300 mm Polycarbonate Substrates [48]
R. Krebser, Netstal-Machinen AG, Switzerland.....297

New Developments in Optical Disc Production Equipment [49]
R. Seiler, E. Sichmann, P. Seserko, A. Petz and S. Reineck, Leybold AG, Germany.....303

The Application of Advanced Control Systems to Optical Disc Manufacturing [50]
A.R. LeBlanc, First Light Technology, Inc......310

Industrial Thin Films

The Application of Thin, Vacuum-Deposited Poly Paraxylylene to Provide Corrosion Protection for Thin Porous Inorganic Coatings [51]
R.A. Olson, Nova Tran Corporation.....317

The Relation between Position and Degree of Step Coverage for a Wafer on a High Speed Plantetary Dome [52]
P. Chang, Airco Coating Technology.....321

Flat Displays: Opportunities for Vacuum Coaters [53]
A.H. Firester, David Sarnoff Research Center.....327

Real-Time In Situ Measurements of Film Thickness and Uniformity During Deposition and Etch Processes [54]
R.N. Savage, SC Technology.....329

Evaporation Boats - Properties, Requirements, Handling, and Future Development [55]
B. Ruisinger and B. Mossner, Elecktroschmelzwerk Kempter GmbH, Germany.....335

Parameter Analysis and Physical Model in an Arc Coating Equipment [56]
L. Gu, Institute of Mechanics, Academy of Sciences, China.....340

Contamination Control

Manufacturing and Packaging of High Purity Chemicals [57]
K. Dillenbeck and T. Hackett, Ashland Chemical, Inc......347

Contamination Measurement and Control in the Semiconductor Industry [58]
R.P. Donovan, Research Triangle Institute.....359

Monitoring Particles in Sputter Coaters [59]
P. Borden and J. Mason, High Yield Technology.....365

Contamination Control Guidelines for Advanced Clean Room Tooling [60]
G.E. Johnson, IBM Corporation.....373

The UV/Ozone Process for Ultra-Cleaning before Vacuum Deposition
E. Laskey, Uvocs, Inc......374

Dry Surface Cleaning Using CO₂ Snow [62]
R. Sherman, Applied Surface Technologies.....378

Vendor Sessions

An Optical Profile Monitor with Zoom Capabilities for Web Coaters [63]
F. Casey, General Vacuum Equipment, United Kingdom; and A.A. Broomfield, General Vacuum Equipment.....383

Sputtering Sources for Physical Vapor Deposition [64]
B.J. Kaemmer, Temescal.....387

Automated Process Control and Data Acquisition through DVOCS (Denton Optical Coating Software) [65]
F.T. Zimone and J. Chen, Denton Vacuum, Inc......393

What is Modular? [66]
S.E. Mackler, Clestra Cleanroom Technology.....395

Pressure and Flow Controls for Vacuum Coating Applications [67]
J. Welch, MKS Instruments, Inc......396

Cathodic Arc Evaporation Source Retrofit Available for most Vacuum Coating Systems [68]
D. Mager, Vapor Technologies, Inc......400

A New and Novel Approach to Control RF Power Sources [69]
S.M. Simons, Manitou Systems, Inc......401

Balzers EBS 200 Electron Beam Evaporation [70]
R. Esposito, Balzers.....405

New Roll-to-Roll Vacuum Coating Equipment for R&D. [71]
C. Misiano, Centro Technologie del Vuoto, Italy; and A. Pasqui, Galileo Vacuum Tec SpA, Italy.....407

Data Acquisition and Control of a Roll Sputter System [72]
K.J. Blackwell, R.A. Carhart and A.R. Knoll, IBM Corporation.....409

Automatic Production Line for 300 mm PMMA Laser Disks with Sputter Metallization [73]
R. Seiler, E. Sichmann, A. Petz and S. Reineck, Leybold AG, Germany.....414