1989 32nd Technical Conference Proceedings

Note: Number in brackets on the top line is the paper number for 1989.

Contamination Control

Plasma Etching as a Cleaning Technique for Vacuum Deposition and Etching Systems [1]
J.L. Vossen, John Vossen Associates, Inc......3

UV/O₃ and Other Oxidative Cleaning Methods [2]
D.M. Mattox, IP Industries.....7

Enhanced Removal of Sub Micron Particles from Surfaces by High Molecular Weight Fluorcarbon Surfactant Solutions [3]
R. Kaiser, Entropic Systems, Inc......10

The Electrophoresis Effect as a Method to Remove Airborne and Surface Contaminants [4]
G. Rappe, American Environmental Systems, Inc......19

Process Technology

Trends in Automotive Forward Lighting [5]
J.E. Kochanowski, GE Plastics.....27

Glassy Barriers from Electron Beam Web Coaters [6]
D. Chahroudi, Suntek.....29

Self-Pumping in High Rate Reactive Sputtering [7]
R.P. Howson and A.G. Spencer, University of Loughborough, United Kingdom.....40

Vendor Session

Equipment and Processes for Depositing High Tc Superconducting Thin Films [8]
C.B. Whitman, CVC Products, Inc......51

New Programmable Controller Designs Monitor the Batch Metallization Process [9]
W. Miller, Stokes Vacuum, Inc......57

Film Monitor for Web Coaters [10]
A. Pasqui, Galileo Vacuum Tec SpA, Italy; and G.E. Stephens, Galileo Corporation of America.....60

Switching to Cryopumped Vacuum System [11]
D. Hanus, CVI, Inc......61

PAL-6800 vs. Automation of Vacuum Coating [12]
Z.W. Celler, M. Hanssmann and R.W. McMahon, Techware System Corporation, Canada.....62

Compact Disc and Media Technology

Environmentally Induced Deterioration of Various Compact Disc Reflective Films [13]
D. Plaisted, Soleras, Ltd.; and D. McMillan, Katahdin Machinery, Ltd......67

Advances in Optical Disc Storage Media Metallization Systems [14]
W. Flaherty and B. Graham, Balzers.....77

Developments in Surface Inspection Technology for Increasing Yield and Improving Quality in the Manufacture of Optical Discs [15]
F. Treiber, Sick Optic-Electronic, Inc......81

Vacuum Web Coating

Thermal Profiles and Model for Various Webs Heated in Vacuo by IR. [16]
K.J. Blackwell and A.R. Knoll, IBM Corporation.....91

A Model for Thermal Creasing and its Application to Web Handling in Roll to Roll Vacuum Coaters [17]
H. Clow, BVT, Ltd., United Kingdom.....100

Polymer Film Substrates for Vacuum Web Coating - A Review of Current and Future Materials [18]
P. Stecher, ICI Americas, Inc......104

Eliminating Dead Times in Metallization Through Design Efficiency in Vacuum Metallizing Machines [19]
F. Rimediotti, Galileo Vacuum Tec SpA, Italy.....122

Comparison of Evaporation Sources for Vacuum Web Coaters [20]
I. Tada, T. Yamamori, K. Matsumori and Y. Yoneda, Ulvac Japan, Ltd., Japan.....131

Economic Considerations of High Speed Roll to Roll Coating Using Electron Beam Technology [21]
V. Olivier, BVT, Ltd., United Kingdom.....150

Design Aspects of Vacuum Web Coaters - High Speed Web Handling [22]
W. Schwartz, Leybold AG, Germany.....156

Plasma Pretreatment of Polyimide Films [23]
V. Fronz, Renker GmbH, Germany.....167

Metal-Dielectric Thin Film Coating for Energy Control [24]
T.G. Hood, Southwall Technologies, Inc......167

Patterning Techniques for Roll Coated Films [25]
R.W. Phillips, D.W. Todd and C.T. Markantes, Flex Products, Inc......175

Computer Control of Wide Web Sputtering Processes [26]
S.F. Meyer, Southwall Technologies, Inc......187

Optical Coatings

A Graphical Technique for Designing Graded Index AR Coatings [27]
D.E. Morton, Optic-Electronic Corporation.....201

Equivalent Index Approximations and Limitations [28]
R.R. Willey, Opto Mechanik, Inc......207

Durable Thin Film Coatings for Reflectors used in Low Earth Orbit [29]
D.J. McClure, 3M Corporation.....211

The Significant Advantage of Using Zinc-Tin Oxide to Antireflect Silver in Low Emissivity Coatings [30]
F.H. Gillery, PPG Industries, Inc......216

The Use of Thorium Fluoride in the Regulatory Environment [31]
M.J. Otten, Opto Mechanik, Inc......220

Multilayer Optical Coating Process Control by Electronic Supervision [32]
C.R. Vogel, Eddy Company.....225

Multilayer Optical Coatings on Plastics [33]
J.J. Walls, Jr., T.J. Frey and R.W. Schaffer, Evaporated Coatings, Inc......231

Evaluation of Scratch Resistant and Antireflective Coatings for Plastic Lenses [34]
J.D. Masso, American Optical Corporation.....237

Optical Performance of a Multi-Layered Sunglass Coating [35]
B.E. Perilloux, Coherent, Inc......241

A Generic Coating for any Index Glass [36]
D. Morton, Optic-Electronic Corporation.....247

High Vacuum Pumping Systems for Optical Thin Films [37]
D. Boyarsky, P.R. Denton, A. Musset and I.C. Stevenson, Denton Vacuum, Inc......252

Influence of Impurities on the Optical Properties of Hafnium Oxide and Tantalum Oxide Thin Films [38]
M. Friz, E. Amadori and F. Konig, E. Merck, Germany; and S.M. McNally, EM Industries.....264

Industrial Thin Films

A New Technique for Controlling Partial Pressures in Reactive Processes [39]
S. Schill, C. Gogol and R. Mueller, Leybold Inficon, Inc......273

Improved Evaporative Deposition for Lift-Off Patterning [40]
R.J. Hill, Temescal.....278

Observing Hydrogen Distributions in Thin Films by Nuclear Reaction Analysis [41]
G. Caskey, Donnelly Corporation; J.J. Kolata, University of Notre Dame; and P.L. Jolivette, Hope College.....284

Sputtered Coatings for Polymeric Composites [42]
D.L. Chambers, K.A. Taylor, C.T. Wan and G.T. Susi, Xytorr Corporation.....290

DC Reactive Sputtering Using a Rotating Cylindrical Magnetron [43]
J. Hofmann, Airco Coating Technology.....297

Vacuum Technology

Mass Spectrometer Leak Detector Testing Training [44]
D.B. Webb, Leybold, Inc......303

Trends in Total Pressure Control for Vacuum Applications [45]
W.R. Clark, P. Hart and J.J. Sullivan, MKS Instruments, Inc......308

Thin Film Depostion for Fingerprint Detection in Criminal Investigations [46]
G. Smith, Edwards High Vacuum International, Inc......320

Methods of Providing Graphical Operator Interfaces on Vacuum Process Plant [47]
G. Cleasby, Edwards High Vacuum International, Inc......325