1987 30th Technical Conference Proceedings

Note: Number in brackets on the top line is the paper number for 1987.

Operation and Interfacing of a Leybold-Heraeus Coater for Optical Coating Production [1]
P. Baumeister, A. Bloom, R. Compton, D. Fischer, C. Huff and B. Periloux, Coherent, Inc......1

Sensitivity of Monitoring Strategies for Periodic Multilayers [2]
R.R. Willey, Opto Mechanik, Inc......7

Transparent, Conducting Indium Tin Oxide Films Formed on Low or Medium Temperature Substrates by Ion-Assisted Deposition [3]
J.A. Dobrowolski, F.C. Ho, D. Menagh, R. Simpson and A. Waldorf, National Research Council of Canada.....15

A Review of Ion Beam Sputter Deposition Technology [4]
T.H. Allen, Optical Coating Laboratory, Inc......27

Computer Software for Designing and Manufacturing Optical Thin Film Coatings [5]
F. Goldstein, FTG Software.....43

Sputtering Technology for Compact Disc Manufacturing [6]
J.R. Lombardo, High Vacuum Equipment Corporation.....49

Sputtering of Compact Discs [7]
D. Boyarsky and P. Denton, Denton Vacuum, Inc......59

Manufacturing Process and Sputtering Technology for Compact Discs [8]
K. Bierwagen, Leybold-Heraeus GmbH, Germany.....67

Quality Control Technology for Compact Disc Manufacturing [9]
K. Pietzsch, Sick Optik Electronik GmbH, Germany; and F. Treiber, Erwin Sick Optik Electronik Company.....77

Electron Beam Evaporation and DC Magnetron Sputtering in Roll Coating [10]
J.S. Matteucci, Optical Coating Laboratory, Inc......91

Recent Advances in Vacuum Roll Coating [11]
S. Komiya, Ulvac Corporation.....105

High Output Electron Beam Metallizing Roll Coater for Packaging Applications [12]
T.B. Walsh, BVT, Ltd., United Kingdom.....111

Sputtered Multilayer Metal and Metal/Dielectric Coatings for Solar Control and Radiation Shielding [13]
W.C. Kittler, Andus Corporation.....118

Vacuum Design for Mixed-Mode Sputtering Roll Coaters [14]
W. Buschbeck, H.J. Eifert and W. Schwartz, Leybold-Heraeus GmbH, Germany.....127

A Review of Diamond and Diamond-Like Carbon Coating Technology [15]
D.G. Thompson, Battelle Columbus Laboratories.....135

An Open Architecture Computer and Software Systems for the Full Automation of Vacuum Coating Equipment [16]
R.W. McMahon, M.G. Hanssmann and A.K. Shuen, Techware Systems, Inc......145

Cryopumps: Cure for a Host of IR Coating Headaches [17]
M. Grandinetti, CTI-Cryogenics, Inc.; and J. Bias, Optical Filter Corporation.....151

Pitfalls of Compact Disc Manufacturing [18]
G. Strasser, F. Roth and B. Crawford, Balzers, AG, Principality of Liechtenstein.....159

Quality Control and Testing Procedures for Compact Discs [19]
A. LeBlanc, Shape Systems Design.....173

Reactive Sputter Roll Coating with Automatic On-Line Process Control [20]
M. Mayr, S. Muller and P. Wirz, Leybold-Heraeus GmbH, Germany.....183

Ultra-Thin Film Metallizing [21]
E.K. Hartwig, Leybold-Heraeus GmbH, Germany.....195

Metallization of High Outgassing Substrates: A Solution [22]
F. Grazzini, A. Fusi and A. Carletti, Officine Galileo, Italy.....199

High-Rate EB Evaporation: State of the Art and Outlook [23]
H. Schiller, H. Foerster, G. Hoetzsch and M. Neumann, Institute M. Von Ardenne, Germany.....207

Headlamps, Photometrics, and Related Problems [24]
C. Willson, Will-Marr Consultants.....219

Evaporation of Various Materials from an Electron Beam Gun [25]
E.B. Graper, Lebow Company.....239

Stress Modification in Thin Films by Ion Bombardment Concurrent with Film Growth [26]
P.H. Wojciechowski.....247

Technology of Oil-Less Vacuum Forepumps [27]
M.H. Hablanian, Varian Associates.....259

Unusual Tests for the Evaluation of Properties of Thin Films and Mounted Thin-film Devices [28]
R. Riegert, Quad Group.....265

Management of Water Vapor in High Vacuum Systems [29]
J. Harvell and P. Lessard, CTI-Cryogenics, Inc......271

Corrosion: Basic Reactions, Tests and Prevention [30]
V. Brusic, IBM Corporation.....277

In-Calibration of Process Pressure Transducers and Flow Controllers [31]
J.P. McGuire, MKS Instruments, Inc......285

Comparison of Film Density, Stoichiometry, Optical and Electrical Properties of Thin Metal Oxide Films Produced by Reactive DC Magnetron Sputtering and Electron Beam Evaporation Techniques [32]
B.P. Hichwa and G. Caskey, Donnelly Corporation.....297

Cryogenic Pump Characteristics for Sputtering Applications [33]
C.T. Wan, D.L. Chambers and G.T. Susi, Xytorr; and K.A. Taylor, CVI, Inc......305

Cathodic Arc Plasma Deposition Processes and Their Applications [34]
P.C. Johnson, Vac-Tec Systems, Inc......317

A Proven, Industrial Magnetron Sputtering System with Excellent Expansion and Scale-Up Capabilities [35]
D. Griffin, Airco Solar Products.....325

Electon Beam Evaporation of Alloys [36]
J. Egermeier and R.J. Hill, Airco Temescal.....329