2006 49th Technical Conference Proceedings

April 22–27, 2006
Washington, D.C. USA

Plenary Session and Keynote Address

Optical Communications: A Glance Back, then a Focus on Now and the Future [1]
Plenary Speaker: Dr. Ed Murphy, Chief Technology Officer for the Components and Modules Product Group of JDS Uniphase, Bloomfield, CT ..... 3

The Use of Drug-eluting Stents in the Treatment of Coronary Artery Disease - Past, Present and Future [2]
Keynote Speaker: George A. Stouffer, MD, Henry A. Foscue Distinguished Professor of Medicine and Cardiology and Director of the Heart Center of the University of North Carolina, Chapel Hill, NC ..... 10

Emerging Technologies

Modification of Film Structure in Pulsed and Inductively-coupled-plasma assisted Pulse Sputtering [3]
E. Kusano, Advanced Materials Science Research and Development Center, Kanazawa Institute of Technology, Hakusan, Ishikawa, Japan ..... 15

Investigation of Reactively Sputtered Titania Thin Films Prepared by DC, Pulsed and Highly Ionized Pulsed Power Magnetron Sputtering [4]
R. Bandorf, M. Vergöhl, and K. Schiffmann, Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany; and T. Wallendorf, IfU GmbH, Lichtenau, Germany ..... 21

Materials for Very Large-Area Solar Reactors for Photobiological or Photoelectrochemical Hydrogen Production from Water [5]
D.M. Blake and C.E. Kennedy, National Renewable Energy Laboratory, Golden, CO ..... 27

Niobium Oxide Film Deposition Using a High-Density Plasma Source [6]
R. Chow, M.A. Schmidt, and A.W. Coombs, Lawrence Livermore National Laboratory, Livermore, CA; and J. Anguita and M.J. Thwaites, Plasma Quest Limited, Hook, United Kingdom ..... 31

Comparison of Current and Emerging Surface Treatment Technologies [7]
A. Yializis and R. Ellwanger, Sigma Technologies International, Tucson, AZ; and R. Wolf, Enercon Industries Corporation, Menomonee Falls, WI ..... 36

Characterization of Hybrid Atmospheric Plasma in Air and Nitrogen [8]
H. Baránková, L. Bárdos, D. Söderström, and L.-E. Gustavsson, Uppsala University, Angstrom Laboratory, Plasma Group, Uppsala, Sweden ..... 41

Surface Modification by a Plasma Accelerator with Closed Electron Drift [9]
W. K. Choi, Korea Institute of Science and Technology, Seoul, Korea; J. Cho, Toray Saehan, Inc., Seoul, Korea; Y. Ermakov and D.V. Skobeltsyn, Institute of Nuclear Physics of the Lomonosov, Moscow, Russia ..... 44

Room-temperature Industrially-scaled Pulsed Laser Deposition of Coatings for Wear-protection, Lowfriction and Decorative Applications [10]
W. Waldhauser and J.M. Lackner, JOANNEUM RESEARCH Forschungsgesellschaft mbH, Laser Center Leoben, Niklasdorf, Austria ..... 50

Room Temperature Solder Bonding of Sputtering Targets to Backing Plates [11]
A. Duckham, J.S. Subramanian, J. Newson, M. Brown, Y. Lin, and Z. He, Reactive NanoTechnologies, Hunt Valley, MD ..... 55

Concept for Lightweight Spaced-Based Deposition Technology [12]
M.L. Fulton, Ion Beam Optics Inc., Thousand Oaks, CA; and A. Anders, Lawrence Berkeley National Laboratory, Berkeley, CA ..... 60

Properties of a Non-thermal Radio Frequency Atmospheric Pressure Plasma Jet (APPJ) [13]
K.-D. Weltmann, R. Foest, E. Kindel, H. Lange, and M. Stieber, Institute for Low-Temperature Plasma Physics (INP), Greifswald, Germany ..... 65

Heuréka! Post-Deadline Recent Developments Session

Organic Vapor Phase Deposition (OVPD): An Emerging Technology for OLED Manufacturing [14]
M. Schwambera, AIXTRON AG, Aachen, Germany ..... 73

Pulsed Laser Deposition with a High Average Power Fiber Laser [15]
T. Amberla, M. Rekow, J. Köngäs, and H. Asonen, Corelase Oy, Tampere, Finland; T. Salminen, N. Viitanen, M. Kulmala, P. Vuoristo, and M. Pessa, Tampere University of Technology, Tampere, Finland; and R. Lappalainen, University of Kuopio, Kuopio and Picodeon Ltd., Helsinki, Finland ..... 79

Expanding the List of Candidate Materials for Reactive Gas Control With Target Voltage Feedback [16]
V. Bellido-Gonzalez, B. Daniel, J. Counsell, and D. Monaghan, Gencoa, Liverpool, United Kingdom ..... 83

Advances in High Power Pulse Reactive Magnetron Sputtering [17]
R. Chistyakov and B. Abraham, Zpulser, LLC, Mansfield, MA; and W.D. Sproul, Reactive Sputtering Consulting LLC, Fort Collins, CO ..... 88

Joint Session: Biomedical and Pharmaceutical Applications of Vacuum Processes and Coatings

Progress in the Development of Photolytic Oxygenation Device Based on the Interaction of UV Light with a Semiconducting Titanium Dioxide Thin Film [18]
R.J. Gilbert, Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA; B.F. Monzyk, Battelle Memorial Institute, Columbus, OH; K.A. Dasse, Levitronix Medical, Waltham, MA; and P.M. Martin, Pacific Northwest National Laboratories, Richland WA ..... 95

Influence of the Surface Properties of Plasma Modified Polystyrene on Cell Morphology and Spreading [19]
D.P. Dowling, School of Electrical, Electronic and Mechanical Engineering, Dublin, Ireland; I. Miller, School of Biomolecular and Biomedical Science, Conway Institute, Dublin, Ireland; P. Duggan and G. Byrne, School of Electrical, Electronic and Mechanical Engineering, Dublin, Ireland; and W. Gallagher, School of Biomolecular and Biomedical Science, Conway Institute, Dublin, Ireland ..... 100

Biomedical Applications of Thin Films Deposited by Plasma Polymerization [20]
C. Oehr, Fraunhofer Institute for Interfacial Engineering and Biotechnology, Stuttgart, Germany ..... 105

Extending the Biocompatibility of Polyurethane Surfaces in Blood Contact by Pulsed Laser Deposited Thin Films [21]
J.M. Lackner and W. Waldhauser, JOANNEUM RESEARCH Forschungsgesellschaft mbH, Laser Center Leoben, Niklasdorf, Austria; R. Major and B. Major, Polish Academy of Sciences, Institute for Metallurgy and Materials Science, Kraków, Poland; R. Kustosz, Fundacja Rozwoju Kardiochirurgii, Zabrze, Poland; and E. Czarnowska, Department of Pathology, Children's Memorial Health Institute, Warsaw, Poland ..... 111

Hard and Protective DLC Coatings for Medical Applications [22]
R. Hauert, Swiss Federal Laboratories for Materials Testing and Research, Empa Dübendorf, Switzerland ..... 115

Wettability and Adhesion Studies of Silicon-Titanium Oxide Based Biocompatible Coatings Deposited by PECVD [23]
G.R. Prasad, National Centre for Plasma Science and Technology, Dublin, Ireland; M.M. Kumar, National Institute for Cellular Biotechnology, Dublin City University, Dublin, Ireland; S.M. Daniels, National Centre for Plasma Science and Technology, Dublin, Ireland; D.C. Cameron, ASTRaL, Lappeenranta University of Technology, Mikkeli, Finland; and M. Clynes, National Institute for Cellular Biotechnology, Dublin City University, Dublin, Ireland ..... 118

New Thin Film Treatments of Dental and Orthopaedic Implants to Improve Their Osseointegration [24]
C. Misiano, Romana Film Sottili, Anzio, Italy; and R. Scandurra, University of Roma 1, Rome, Italy ..... 123

Adhesion of Hybrid Poly (ethylene glycol) – Soy Protein Hydrogels to Plasma Treated Polymer Surfaces [25]
R. Snyders and O. Zabeida, Department of Engineering Physics, Ecole Polytechnique, Montreal, Quebec, Canada; K. Shingell and C. Roberge, Bioartificial Gel Technologies, Montreal, Quebec, Canada; and L. Martinu and J.E. Klemberg-Sapieha, Department of Engineering Physics, Ecole Polytechnique, Montreal, Quebec, Canada ..... 126

Joint Session: Processes, Materials, and Coating Systems for Flexible Electronics

Scale-up of Thermal Evaporation Processes for Large-Area Coatings of “Small Molecule” Organic Light-Emitting Diode Materials [26]
J.M. Grace, D.R. Freeman, and N.P. Redden, Eastman Kodak Company, Rochester, NY; and J. Klug, Deutsche Bank AG, New York, NY ..... 133

Ultrabarrier Protective Coatings for Lithium Thin Film Batteries and Thin Film Photovoltaics [27]
M.E. Gross, L.C. Olsen, W.D. Bennett, C.C. Bonham, P.M. Martin, G.L. Graff, and S. Kundu, Pacific Northwest National Laboratory, Richland, WA ..... 139

Flexible Organic Electronics: The Role of Plasma Deposition in Multi-layer Permeation Barrier Technology [28]
M. Creatore, V.I.T.A. Lohmann, M.A. Blauw, and M.C.M. van de Sanden, Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands ..... 143

Room-Temperature Crystallization by using RF Plasma [29]
H. Ohsaki, Y. Shibayama, M.Suzuki, and A. Kinbara, Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan; H. Yashiro, Application Laboratory, Rigaku Corporation, Akishima, Japan; and T. Watanabe, Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan ..... 147

Plasma-Assisted Atomic Layer Deposition of Al₂O₃ on Polymers [30]
E. Langereis, S.B.S. Heil, M. Creatore, M.C.M. van de Sanden, and W.M.M. Kessels, Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands ..... 151

Large Area Coating

Surface Resistivity Distribution of SnO₂ Coatings Deposited Using a Rectangular Filtered Vacuum Arc Deposition System [31]
R.L. Boxman, V.N. Zhitomirsky, and Z. Abunie, Electrical Discharge and Plasma Laboratory, Tel-Aviv University, Tel-Aviv, Israel ..... 157

Minimizing the Picture Frame Effect on “Cut-size” Glass in Architectural Glass Coaters by Simple Modifications [32]
M. Geisler, R. Trassl, A. Kastner, and M. List, Applied Films, Alzenau, Germany ..... 162

What Architects Want from Large Area Coatings [33]
D. McCann, Viracon, Owatonna, MN ..... 166

Cross Corner Effect in Rectangular Magnetron Sputtering: Experiments and Monte Carlo Simulation [34]
Y. Yang*, X. Liu, X. Chen, and L. Cha, Department of Electronic Engineering, Tsinghua University, Beijing, China; and S. Xu and C. Fan, HIVAC Technology Co. Ltd, Shenzhen, China ..... 173

The Growth and Future for Large Area Architectural Coatings [35]
F. Wallin, AFG Industries, Inc., Kingsport, TN ..... 178

The Impact of Power Supply Arc Response on Production Yield and Field Reliability [36]
D. J. Christie, Advanced Energy Industries, Inc., Fort Collins, CO ..... 183

Advantages of Using Rotating Cylindrical ITO Targets for Large Area Coating Applications [37]
A. Blondeel, H. Delrue, S. Matthews, and J. Van Holsbeke, Bekaert Advanced Coatings, Deinze, Belgium, and W. De Bosscher, Bekaert Advanced Coatings, Zulte, Belgium ..... 187

High Target Utilization for ITO of More Than 60% With a New Planar Magnetron Cathode [38]
M. Scherer, T. Fritz, M. Klosch, and J. Pistner, Leybold Optics GmbH, Alzenau, Germany ..... 192

High Power RF and MF Systems for Flat Panel Display Applications [39]
D. Ochs and T. Rettich HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany ..... 197

Deposition Source Design Adapted to Vaporizing Temperature Sensitive Materials [40]
M. Long, J.M. Grace, D.R. Freeman, N.P. Redden, and B.E. Koppe, Eastman Kodak Company, Rochester, NY; and R.C. Brost, Eastman Kodak Company, Albuquerque, NM ..... 201

Large Area EB-PVD of Silver Based Super-Reflectors [41]
E. Reinhold, J. Faber, C. Deus, and H. Obst, VON ARDENNE Anlagentechnik GmbH, Dresden, Germany ..... 205

Performance Comparison of Silver Sleeved Rotary Targets with Planar Targets [42]
G.M. Wityak, Academy Corporation, Albuquerque, NM; and A. Blondeel and W. De Bosscher, Bekaert Advanced Coatings, Deinze, Belgium ..... 211

Three Dimensional Plasma Simulations with a Parallelized Particle-in-Cell Monte Carlo Approach [43]
M. Siemers, A. Pflug, and B. Szyszka, Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany ..... 216

Optical Coating

Strategies for In-Situ Evaluation of Optical Layer Stacks in Large-Area In-Line Production Systems [44]
C. Deus and H. Proehl, VON ARDENNE Anlagentechnik GmbH, Dresden, Germany ..... 223

Direct Optical Monitoring in Intermittent Mode [45]
A. Zoeller, M. Boos, R. Goetzelmann, H. Hagedorn, and W. Klug, Leybold Optics, Alzenau, Germany ..... 229

Low Angle Shift Infrared Blocking Filter using Silver-Dielectric Thin Films [46]
G. Ockenfuss, JDSU, Santa Rosa, CA ..... 235

A New Approach to Blocked Multi-Cavity Filters [47]
D. Cushing, Tucson, AZ ..... 239

Correction of Optical Wafers to Lambda/1000 Thickness Uniformity by Selective Deposition Through an Optimally Designed Multi-aperture Mask [48]
J. Arkwright, CSIRO Industrial Physics, Lindfield, Australia ..... 244

Research on Design Method of Uniformity Masking for Flat Planetary Fixture [49]
M. Fang, K. Yi, and Z.X. Fan, R&D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China ..... 249

Progress Toward Developing a Durable High-Temperature Solar Selective Coating [50]
C.E. Kennedy and H. Price, National Renewable Energy Laboratory (NREL), Golden, CO ..... 254

Properties of Indium Tin Oxide Deposited Using Reactive Closed Field Magnetron Sputtering [51]
D.R. Gibson, I.T. Brinkley, G.H. Hall, E.M. Waddell, and J.M. Walls, Applied Multilayers Ltd., Coalville, United Kingdom ..... 260

Deposition of Multilayer Optical Films and Rugate Filters Deposited by Reactive Magnetron Sputtering [52]
M. Vergöhl, C. Rickers, U. Kricheldorf, K. Schiffmann, and P. Giesel, Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany; and R. Dittrich, IfU GmbH, Lichtenau, Germany; and U. Richter, Sentech Instruments GmbH, Berlin, Germany ..... 265

Influence of Nanosized Metal Clusters on the Generation of Strong Colors and Controlling of their Properties through Physical Vapor Deposition (PVD) [53]
R. Domnick, identif GmbH, Erlangen, Germany; M. Bauer, Attophotonics Biosciences GmbH, Wiener-Neustadt, Austria and Max F. Perutz Laboratories, Vienna, Austria; S. Genov and R. Friedel, identif GmbH, Erlangen, Germany; G. Bauer, Siemens, Erlangen, Germany; and M. Belzner, identif GmbH, Erlangen, Germany ..... 271

Filter Design for AMLCD Full-Color Displays Compatible with Night Vision Devices [54]
R.R. Willey, Willey Optical, Consultants, Charlevoix, MI ..... 275

In Situ Ellipsometry and Monte-Carlo Simulation Studies of the Role of Ion Bombardment in the Growth of Optical Films [55]
A. Amassian, P. Desjardins, and L. Martinu, Regroupement Québécois sur les Matériaux de Pointe (RQMP) and Department of Engineering Physics, École Polytechnique, Montréal, Québec, Canada ..... 280

Thin Film Technology Applied to Spacecraft Systems [56]
J.B. Heaney, Swales Aerospace, Beltsville, MD ..... 288

Advanced High Reflector Coatings for the Thirty Meter Telescope [57]
W.D. Bennett and P.M. Martin, Pacific Northwest National Laboratory, Richland, WA; A. Phillips, W. Brown, and V. Wallace, UCO Lick Observatory, Santa Cruz, CA; J. Stilburn, National Research Council of Canada, Victoria, British Columbia, Canada; and J. Sebag, National Optical Astronomy Observatory, Tucson, AZ ..... 295

Comparison of Graded-index and Multilayer QW Stack Narrowband Optical Filters for Astronomy [58]
M.-M. de Denus-Baillargeon* and L. Martinu, Département de génie physique, École Polytechnique de Montréal, Montréal, Canada; and C. Carignan and O. Hernandez, Laboratoire d’astrophysique expérimentale, Département de physique, Université de Montréal, Montréal, Canada ..... 299

A New Step Method for the Synthesis of Optical Filters with Arbitrary Indices [59]
S. Larouche and L. Martinu, École Polytechnique de Montréal, Montréal, Canada ..... 305

Diamond-like Carbon Depositions and Characterization [60]
D.E. Morton and I. Stevenson, Denton Vacuum, Moorestown NJ; R. Vernhes, B. Baloukas, R. Snyders, and J.E. Klemberg-Sapieha, École Polytechnique, Montréal, Canada; and S.J. Finke and J.E. Yehoda, Morgan Advanced Ceramics, Inc., Diamonex Products Division, Allentown PA ..... 309

Simultaneous Reflection and Transmission Measurements to Determine the Optical Constants of Thin Films in the Extreme Ultraviolet [61]
D.D. Allred, G.A. Acosta, N. Farnsworth-Brimhall, and R. S. Turley, Brigham Young University, Provo, UT ..... 314

E-gun Sweep Design to Improve Silica Coating Performance: E-Gun Nonlinearity Investigation and Silica Evaporation Modeling for Sweep Design [62]
B. Xu and M. Gevelber, Boston University, Brookline, MA; D. Smith, Plymouth Grating Laboratory, Plymouth, MA; G. Reimann, Cyber Materials LLC, Auburndale, MA; and J. Bellum, Sandia National Laboratories, Albuquerque, NM ..... 319

Plasma Processing

The High Power Impulse Magnetron Sputtering Discharge: The Ionization Mechanism [63]
J.T. Gudmundsson, Science Institute and Department of Electrical and Computer Engineering, University of Iceland, Reykjavik, Iceland ..... 329

64 Reactive Film Growth of TiN by Using High Power Impulse Magnetron Sputtering (HIPIMS) [64]
J. Böhlmark, Chemfilt Ionsputtering AB, Linköping, Sweden and Plasma & Coatings Physics, IFM Material Physics, Linköping University, Linköping, Sweden; M. Lattemann, Plasma & Coatings Physics, IFM Material Physics, Linköping University, Linköping, Sweden; H. Stranning, Plasma & Coatings Physics, IFM Material Physics, Linköping University, Linköping, Sweden and AB Sandvik Tooling, Stockholm, Sweden; T. Selinder, AB Sandvik Tooling, Stockholm, Sweden; J. Carlsson, Chemfilt Ionsputtering AB, Linköping, Sweden; and U. Helmersson, Plasma & Coatings Physics, IFM Material Physics, Linköping University, Linköping, Sweden ..... 334

High-power Pulsed Sputtering with a Newly Designed Magnetron [65]
J. Vlcek, P. Kudlacek, K. Burcalova, and J. Musil, Department of Physics, University of West Bohemia, Plzen, Czech Republic ..... 338

Deposition of High Conductivity ITO Films by High Power Pulsed Magnetron Sputtering (HPPMS) [66]
V. Sittinger, F. Ruske, C. Gerloff, W. Werner, and B. Szyszka, Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany; and D.J. Christie, Advanced Energy, Fort Collins, CO ..... 343

Industrial-Scale Production of Corrosion-Resistant CrN/NbN Coatings Deposited by the Combined High Power Impulse Magnetron Sputtering Etching Unbalanced Magnetron Sputtering Deposition (HIPIMS/UBM) Process [67]
A.P. Ehiasarian, C. Reinhard, and P.Eh. Hovsepian, Materials and Engineering Research Institute, Sheffield Hallam University, Sheffield, United Kingdom; and J.M. Colton, Zachrome Works, Chesterfield, United Kingdom ..... 349

Low-Energy Ion-Beam Etching [68]
J.R. Kahn and H.R. Kaufman, Kaufman & Robinson Inc., Fort Collins, CO ..... 354

Electric Fields and Plasma Excitation Around an RF Powered Electrode [69]
E.V. Barnat and G.A. Hebner, Sandia National Laboratories, Albuquerque, NM ..... 359

Surface Energy Enhancement, Plasma Chemical Vapor Deposition (PCVD), and Plasma Etching with the One Atmosphere Uniform Glow Discharge Plasma (OAUGDP^®) [70]
J.R. Roth, T.A. Bonds, and S. Nourgostar, UT Plasma Sciences Laboratory, Department of Electrical and Computer Engineering, University of Tennessee, Knoxville, TN ..... 363

Cleaning and Improving Adhesion of Surfaces by Their Treatment with Excited Atomic Oxygen [71]
E.V. Shun’ko and V.S. Belkin, WINTEK Electro-Optics Corporation, Ann Arbor, MI ..... 378

Atmospheric Plasma Treatment of Polyamide Films [72]
D. Pappas, A. Bujanda, J.D. Demaree, J.K. Hirvonen, W. Kosik, R. Jensen. and S. McKnight, Army Research Laboratory, Aberdeen Proving Ground, MD ..... 385

PECVD of SiOx Films with Electron Beam Generated Plasmas [73]
D. Leonhardt and S.G. Walton, US Naval Research Laboratory, Plasma Physics Division, Washington, DC ..... 389

Coating with Atmospheric Pressure Plasma Processes: From Large Area to £g-Structures [74]
M. Thomas, M. Eichler, and C.-P. Klages, Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany ..... 394

Sputtering of Polymers in Argon-Nitrogen Mixture [75]
J. Kousal*, J. Hanus, A. Choukourov, H. Biederman, and D. Slavinska, Department of Macromolecular Physics, Faculty of Mathematics and Physics, Charles University in Prague, Prague, Czech Republic ..... 400

Diagnostics and Processing Applications of Electron Beam-Generated Plasmas Produced in Nitrogen [76]
S.G. Walton, D. Leonhardt, and R.F. Fernsler, Plasma Physics Division, US Naval Research Laboratory, Washington, DC ..... 404

Smart Sputter and Etch Source Concepts for Low COO 300mm Wafer Processing [77]
J. Weichart, Unaxis Balzers Aktiengesellschaft, Wafer Processing Division, Balzers, Principality of Liechtenstein ..... 409

Sub Microsecond Resolved OES Investigations in a Pulsed Magnetron Discharge for Amorphous Carbon Strain Gauge Thin Film Deposition [78]
T. Wallendorf and S. Marke IfU Diagnostic Systems GmbH, Lichtenau, Germany; and R. Bandorf, Fraunhofer Institut Schicht- und Oberflächentechnik, Braunschweig, Germany ..... 413

Process Control & Instrumentation

Robust Controller Tuning for Evaporative Deposition Processes: Results from Manufacturing Case Studies [79]
G. Reimann, B. Vattiat, and A. Brewster, Cyber Materials LLC, Auburndale, MA; M. Gevelber, Boston University, Manufacturing Engineering, Brookline, MA; and J. Hildebrand and C. Hildebrand, Maxtek Inc., Cypress, CA ..... 421

Modeling of the Plasma Emission Redistribution Effect During Pulsed DC Magnetron Sputtering [80]
G. Buyle and R. De Gryse, Ghent University, Ghent, Belgium; S. Shanmugamurthy, A. Belkind, and K. Becker, Stevens Institute of Technology, Hoboken, NJ ..... 428

A Second Hysteresis Effect of Reactive Magnetron Sputtering in Compound Mode [81]
A. Pflug, M. Siemers, and B. Szyszka, Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany; and D. Severin, I. Physikalisches Institut (1A), Aachen, Germany ..... 434

Radio Frequency Impedance Analysis of Silane Plasma for the Growth of Nanocrystalline Silicon Thin Films [82]
P.N. Dixit, S. Kumar, C.M.S. Rauthan, M. Dilshad, A. Bhardwaj, and S.S.Rajput, Plasma Processed Materials Group, National Physical Laboratory, New Delhi, India ..... 441

Smart Materials Symposium

Influence of the Nature of Electrodes on Lifetime of P3HT:PCBM Bulk Heterojunction Solar Cell [83]
R. De Bettignies, J. Leroy, M. Firon, and C. Sentein, CEA Saclay, Gif-sur-Yvette, France ..... 447

Low Band Gap Polymers for Photovoltaic Devices [84]
E. Bundgaard and F.C. Krebs, Risø National Laboratory, Roskilde, Denmark ..... 453

Realization and Development of Extremely Thin Absorber Solid State Solar Cells (ETA) [85]
M. Biancardo and F.C. Krebs, Risø National Laboratory, Danish Polymer Centre, Roskilde, Denmark ..... 458

Sputter Deposition of High Quality Thermochromic VO2 Films for Smart Windows [86]
Y. Shigesato and K. Kato, Graduate School of Science and Engineering, Aoyama Gakuin University, Kanagawa, Japan ..... 463

Multifunctional Carbon Nanotube Yarns and Textiles for Fun and Profit: Artificial Muscle, Electronic Textile, Energy Storage and Harvesting, Display, Electron Emission, and Other Applications [87]
R.H. Baughman, M. Zhang, S. Fang, A.A. Zakhidov, M. Kozlov, S.B. Lee, A.E. Aliev, and C.D. Williams, NanoTech Institute, University of Texas at Dallas, Richardson, TX; and K.R. Atkinson, CSIRO Textile & Fibre Technology, Belmont, Australia ..... 466

LGAR (Ion Layer Gas Reaction) – A Versatile Low-cost Method for the Deposition of High Quality Thin Semiconductor and Insulator Layers [88]
Ch.-H. Fischer, Hahn-Meitner-Institut Berlin, Berlin, Germany and Freie Universität Berlin, Berlin, Germany; N. Allsop, Hahn-Meitner-Institut Berlin, Berlin, Germany; M. Bär, University of Nevada, Las Vegas, NV; H.-J. Muffler, Energy Research Center of The Netherlands - ECN, ZG Petten,
The Netherlands, and M.C. Lux-Steiner, Hahn-Meitner-Institut Berlin, Berlin, Germany and Freie
Universität Berlin, Berlin, Germany ..... 470

Influence of the D.C. Magnetron Sputter Deposition Process on the Photocatalytic Activity of Amorphous TiO₂ Thin Films [89]
K. Eufinger, D. Poelman, H. Poelman, and R. De Gryse, Department of Solid State Sciences, Ghent, Belgium; and G.B. Marin, Laboratorium voor Petrochemie Ghent University, Ghent, Belgium ..... 480

Efficient Plastic Solar Cells with Easy Solution Processing [90]
G. Li, V. Shrotriya, J. Huang, Y. Yao, and Y. Yang, Department of Materials Science and Engineering, University of California, Los Angeles, CA ..... 485

Interaction Between Inorganic Compounds and Conjugated Polymers: Application as Hybrid Solar Cells and Hybrid Solar Sensors [91]
M. Lira-Cantu and J. Oró, Instituto de Ciencia de Materiales de Barcelona, Campus UAB, Barcelona, Spain; and F.C. Krebs, Risø National Laboratory, The Danish Polymer Centre, Roskilde, Denmark ..... 491

Development of Evacuated Window – Vacuum Glazing [92]
N. Ng and L. So, School of Physics A28, The University of Sydney, Sydney, Australia ..... 495

Smart Nano-Materials for Benign Indoor Environments [93]
C.G. Granqvist, Department of Engineering Sciences, The Ångström Laboratory, Uppsala University, Uppsala, Sweden; A. Azens, ChromoGenics Sweden AB, Uppsala, Sweden; P. Heszler, Research Group
of Laser Physics of the Hungarian Academy of Sciences, University of Szeged, Szeged, Hungary; L.B. Kish, Department of Electrical Engineering, Texas A&M University, College Station, TX; and L. Österlund, Department of Environment and Protection, FOI NBC Defence, Umeå, Sweden ..... 498

Tribological and Decorative Coating

Tribological Challenges For Plasma Surface Engineered Materials – A Personal View [94]
P.A. Dearnley, School of Mechanical Engineering, University of Leeds, UK ..... 507

Comparison of Color Coatings on Stainless Steels Produced by Magnetron or Arc Deposition [95]
M. Tobler and R. Bonetti, IonBond AG, Olten, Switzerland; I. Smith, IonBond, Mansfield, United Kingdom; and P. Nagel and G. van der Kolk, IonBond NL BV, Venlo, The Netherlands ..... 518

Adhesion of Galvanically Strengthened PVD Copper Metallization Films on ABS: A Model Study [96]
C. Schrauwen, R. Tacken, V. Frencken, T. van Oudheusden, R. Renders, and K. Spee, TNO Science and Industry, BU Materials Technology, Eindhoven, The Netherlands ..... 523

Carbon Based Coating Systems for Forming Tools [97]
M. Weber, K. Bewilogua, I. Bialuch, M. Keunecke, H. Thomsen, and R. Wittorf, Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, Germany ..... 529

An Adherent Nano-superhard TiN Film Synthesized by a Vacuum Cathode Multi-arc Ion-plated System [98]
X. Yu, China University of Geosciences, Beijing, People's Republic of China; Y. Liu, Beijing Powertech Co. Ltd., Beijing, People's Republic of China; C.B. Wang, China University of Geosciences, Beijing, People's Republic of China; and D.Y. Yu, Beijing Powertech Co. Ltd., Beijing, People's Republic of China ..... 538

Tribological Studies of Titanium Nitride Coatings Deposited by Pulsed Magnetron Sputtering [99]
P.J. Kelly, Surface Engineering Group, Manchester Metropolitan University, Manchester, United Kingdom; Z. Liu, Institute for Materials Research, University of Salford, Salford, United Kingdom; and R.D. Arnell, Jost Institute for Tribotechnology, University of Central Lancashire, Preston, United Kingdom ..... 544

Properties of Magnetron Sputtered Hard Coatings on Carbon and Glass Fibre Composites [100]
T. Kääriäinen, M. Rahamathunnisa, M. Tanttari, and D.C. Cameron, ASTRaL, Lappeenranta University of Technology, Mikkeli, Finland ..... 548

Microtribology: Carbon Based Coatings on Micro Structured Surfaces [101]
R. Bandorf, H. Lüthje, R. Küster, and J.-H. Sick, Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany ..... 554

Intensive Color Coatings Deposited by Magnetron Sputtering [102]
Y. Yamazaki, M. Thompson, and H. Richter, Jr., Richter Precision, Inc., East Petersburg, PA; S. Kunkel and W.D. Münz, SVS Vacuum Coatings Technologies, Karlstadt, Germany ..... 558

The Micro-Drilling and Turning Performance of Ti₂NyWx Coatings Deposited by Magnetron Sputtering [103]
T.H. Liu and Y.L. Su, National Cheng Kung University, Tainan, Taiwan; C.T. Su, National Koahsiung First University of Science and Technology, Koahsiung, Taiwan; and S.H. Yao, Chang Jung Christian University, Tainan, Taiwan ..... 563

Silicon Dioxide Coatings on Plastic Substrates by a Large Area Plasma Enhanced Chemical Vapor Deposition Process [104]
J. Madocks, P. Marcus, and P. Morse, General Plasma, Inc., Tucson, AZ ..... 569

Structure Evolution of Cr-Al-N Hard Coatings [105]
P.H. Mayrhofer, Physical Metallurgy and Materials Testing, Montanuniversität Leoben, Leoben, Austria, and Thin Film Division, Department of Physics (IFM), Linköping University, Linköping, Sweden; H. Willmann, Thin Film Division, Department of Physics (IFM), Linköping University, Linköping, Sweden, and Materials Center Leoben, Leoben, Austria; and A.E. Reiter, Balzers Ltd., Liechtenstein, Austria ..... 575

Improving the Performance of Rolling Element Bearings with Nanocomposite Tribological Coatings [106]
G.L. Doll, The Timken Company, Canton, OH ..... 580

Tribological Properties of CrN/Wx Nanolayered Coatings Deposited by Magnetron Sputtering [107]
T.H. Liu and Y.L. Su, Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan ..... 589

PVD Coatings on Plastic Substrates [108]
P. Peeters, M. Eerden, J. Landsbergen, R. Tietema, and T. Krug, Hauzer Techno Coating, Venlo, The Netherlands ..... 595

Comprehensive Tribo-mechanical Testing of Hard Coatings [109]
N. Gitis, S. Kuiry, A. Daugela, M. Vinogradov, and J. Xiao, Center for Tribology, Inc., Campbell, CA ..... 599

Vacuum Web Coating

Roll-to-roll Production of Thin Film Silicon Solar Cells on PET Film Substrate: A Smart Energy Option of the Future [110]
Y. Ziegler and D. Fischer, VHF-Technologies, Yverdon-les-Bains, Switzerland ..... 609

Heat Sterilizable Gas Barrier Film Deposited on Polyamide by Plasma-Enhanced CVD [111]
D. Chiba, K. Mikami, H. Sakamoto, and H. Tsuchiya, Dai Nippon Printing Co. Ltd., Tokoyo, Japan ..... 613

Thin Film Engineering of Indium Tin Oxide for Large Area Optoelectronic Application [112]
M.K. Olsson, Umicore Materials AG, Balzers, Liechtenstein; and U. Betz, Balzers Verschleissschutz GmbH, Bingen, Germany ..... 617

Enhanced Water Vapor Permeability Tester for High Barrier Materials [113]
A. Hartvigsen, PBI-Dansensor A/S, Ringsted, Denmark ..... 623

Pilot Production of Ultrabarrier Substrate for Flexible Displays [114]
S. Kapoor, M.E. Seta, and R.J. Visser, Vitex Systems, San Jose, CA; M.E. Gross and W.D. Bennett, Pacific Northwest National Laboratory, Richland, WA; and R. Newton, K. Goodwin, and Y. Deng, Techni-Met, Windsor, CT ..... 625

Advances in Laser Assisted Vaporization for Micro-patterning in a Vacuum Web Coater [115]
K. Coulter, J. Cernosek, and J. Arps, Southwest Research Institute, San Antonio TX ..... 632

Clear Barrier Coatings by Plasma CVD for Packaging Applications [116]
A.W. Smith and N. Copeland, General Vacuum Equipment Ltd., Heywood, Lancs, United Kingdom ..... 636

New Developments for the Continuous High Rate Production of Physical Vapor Deposition (PVD) Flake Pigments Without Use of Consumable Substrates [117]
H.H. Weinert, Weinert Vakuum VT GmbH, Kaufbeuren, Germany ..... 642

How Items Such as Dust, Oligomers & Slip Agents Can Affect the Polymer Film Surface Quality and be Potential Problems in High-tech Roll-to-roll Vacuum Deposition Applications [118]
C.A. Bishop, C.A.Bishop Consulting Ltd., Leicestershire, United Kingdom; and G. Tullo, SE Associates, Inc., Raleigh, NC ..... 648

Microstructural and Barrier Properties of Multilayered Films [119]
B.M. Henry, D. Howells, J.A. Topping, H.E. Assender, and C.R.M. Grovenor, Department of Materials, University of Oxford, Oxford, United Kingdom; and L. Marras, Department of Materials Engineering and Applied Chemistry, University of Trieste, Trieste, Italy ..... 654

Coatings Generation and Control of Wide Area, Homogenous Atmospheric Pressure Glow Discharges for Industrial Coating Applications [120]
L. O’Neill, A. Hynes, W. Castagna, K. Carr, J. Kennedy, and F. Swallow, Dow Corning Plasma Solutions, Cork, Ireland ..... 658

Water Vapor Permeation Through Polymer Films at Elevated Temperatures [121]
H. Nörenberg, Technolox Ltd., Oxford, United Kingdom; and M. Percy, Victrex plc, Thornton Cleveleys, United Kingdom ..... 664

Poster Session

Pretreatment and Deposition of Copper on Polyimide for Flexible Copper Clad Laminate Using Vacuum Web Sputtering System [122]
J. Cho, B.J. Kim, and Y.S. Kim, Toray Saehan, Inc., Seoul, Korea; and H.W. Choi and W.K. Choi, Thin Film Materials Research Center (TF-MRC), Korea Institute of Science and Technology, Seoul, Korea ..... 669

AFM Studies of Corona Treated Uniaxially Drawn PET Films [123]
L.L. Wright, Department of Chemistry, Furman University, Greenville, SC; and R. Posey and E. Culbertson, Mitsubishi Polyester Film, Inc, Greer, SC ..... 673

Properties of ITO Thin Films Deposited on Polycarbonate Substrates by Ion Beam Assisted Deposition (IBAD) [124]
L.-J. Meng, Departamento de Física, Instituto Superior de Engenharia do Porto, Porto, Portugal and Centro de Física, Universidade do Minho, Braga, Portugal; and J. Gao, X. Wang, and T. Wang, Center of Optical Technology, Changchun Institute of Optics, Fine Mehanics and Physics of Chinese Academy of Science, Changchun, China ..... 679

Single Particle Studies for Drug Delivery Systems [125]
A. Momaya*, B. Duncan, and D. Needham, Department of Biomedical Engineering, Duke University, Durham, NC ..... 684

Nanoparticles Fabricated with Glancing Angle Deposition [126]
J. Yang*, R. Dariani, C. Elliott, C. Buzea, and K. Robbie, Department of Physics, Queen’s University, Kingston, Ontario, Canada ..... 689

Permeation Studies of R134a and R227 Through Polymer Substrates Over a Wide Temperature Range [127]
H. Nörenberg, Technolox Ltd., Oxford, United Kingdom ..... 694

Oxide Protective Coating for Automotive Lighting Reflectors [128]
Y. Siddiqui, Guide Corporation, Pendleton, IN; D. Pelleymounter, Advanced Energy Industries, Inc., Northfield, MN; M. McFall, Guide Corporation, Pendleton, IN; and D. Crawford, Kettering University, Flint, MI ..... 697

Need for Abrupt Transitions in Index of Refraction in the Soft X-ray Spectral Region [129]
R.R. Willey, Willey Optical, Consultants, Charlevoix, MI ..... 700

A New End-Hall Ion Source with Improved Performance [130]
L. Mahoney, D. Burtner, and D. Siegfried, Veeco Instruments Inc., Fort Collins, Colorado ..... 706

Filter Sets for the Visible Spectrum [131]
D. Cushing, Tucson, AZ ..... 712

Morphology of Metal/Dielectric Composite Films – Thick Sections [132]
S. Novák, Faculty of Science, Purkynû University, Ústí nad Labem, Czech Republic; M. ·vec and R. Hrach, Faculty of Science, Purkynû University, Ústí nad Labem, Czech Republic, and Faculty of Mathematics and Physics, Charles University, Praha, Czech Republic; and J. ·kvor, Faculty of Science, Purkynû University, Ústí nad Labem, Czech Republic ..... 716

Plasma Diagnostics Techniques for Monitoring of Plasma Oxidation of Thin Metal Films [133]
J. Pavlik, Z. Stryhal, J. Matousek, and S. Novak, J.E. Purkyne University, Faculty of Science, Usti nad Labem, Czech Republic; and P. Hedbavny, Vakuum Praha, Prague, Czech Republic ..... 719

Reactively-sputtered Silicon-oxynitride Films and Filters [134]
P. Ma, F. Lin, and P.G. Verly, National Research Council of Canada, Ottawa, Canada ..... 725

Performance Index Evaluation of Coated Cutting Tool for Machining Process Using Neural Network [135]
D.H. Rho and S.M. Yoo, Department of Mechanical Engineering, College of Advanced Technology, Kyung Hee University, Soowon, Korea ..... 728

On Recent Progress Applying Quantum Cascade Laser-Absorption Spectroscopy for Plasma Process Monitoring [136]
J. Roepcke, S. Glitsch, F. Hempel, M. Huebner, N. Lang, U. Macherius, H. Pridoehl, S. Saß, G.D Stancu, K.-D. Weltmann, S. Welzel, and H. Zimmermann, INP-Greifswald, Greifswald, Germany ..... 733

TiO₂ Solar Cell Enhanced by Metal Plasma Ion Implantation [137]
D.-Y. Wang, C.-L. Chang, and C.-C. Yen, Department of Materials Science and Engineering, MingDao University, Taiwan, R.O.C. ..... 738

Innovators Showcase

Further Reductions of Total Cost of Ownership in Large Area Optical Coatings [138]
W. De Bosscher, Bekaert Advanced Coatings, Zulte, Belgium; and A. Blondeel, G. Gobin, K. Staelens, and H. Delrue, Bekaert Advanced Coatings, Deinze, Belgium ..... 745

Unique Rotating Cylindrical Magnetron Designs for Display Coaters [139]
K. Dellaert, A. Blondeel, W. De Bosscher, and B. Verlinden, Bekaert Advanced Coatings, Zulte, Belgium ..... 750

Optimized Short-Cycle Deposition System for Metallization and Protective Coating [140]
B. Gebhardt, B. Bücken, and M. Falz, VTD VAKUUMTECHNIK DRESDEN GmbH, Dresden Germany ..... 755