2001 44th Technical Conference Proceedings

Note: Number in brackets on the top line is the paper number for 2001.

Plenary Session

The Coming of Molecular Optoelectronics [1]
Speaker: Professor Stephen Forrest, Princeton University, PA
Executive Summary provided by Program Chair Peter Martin, Battelle Pacific Northwest Laboratory, Richland, WA.....3

Growth and Analysis of Binary and Ternary Nitride Coatings Using Spectroscopic Ellipsometry [2]
S.M. Aouadi, T.Z. Gorishnyy, and S.L. Rohde, University of Nebraska, Lincoln, NE; E. Tobin and
F. Namavar, Spire Corporation, Bedford, MA .....9

Dynamic Simulation of Process Control of the Reactive Sputter Process Using Two Separate Targets and Experimental Results [3]
N. Malkomes, A. Bierhals, B. Szyszka, and M. Vergöhl, Fraunhofer Institute for Thin Films and Surface Engineering (IST), Braunschweig, Germany .....13

The Use of Dry Pumps in Vacuum Coating [4]
J. McFadden, McFadden Associates, Exton, PA .....20

Substrate Neutralization Methods for the Closed Drift Ion Sources [5]
A. Shabalin, M. Kishinevsky, and C. Quinn, Advanced Energy Industries, Fort Collins, CO .....23

In Situ Analysis of Particle Contamination in Magnetron Sputtering Process During Magnetic Media Manufacturing [6]
F. Sequeda, Universidad del Valle, Santiago de Cali, Colombia; and G.S. Selwyn, Los Alamos National Laboratory, Los Alamos, NM .....29

Hard Coatings—Past, Present, and Future [7]
W.S. Fleischer, Bodycote Coating Centrum BV, Venlo, The Netherlands; G.J. van der Kolk and A.P.A. Hurkmans, Hauzer Techno Coating Europe BV, Venlo, The Netherlands; and T.T. Trinh and B.J.A.M. Buil, Bodycote Coating Centrum BV, Venlo, The Netherlands .....39

PVD In-line System for Decorative Hard Material Coating—Experiences Based on Two Years of Production Operation [8]
B. Gebhardt, T. Lunow, M. Falz, and R. Wilberg, VTD Vakuumtechnik Dresden GmbH, Germany; and J. Richter, JADO AG Rödermark, Germany .....46

Arc-Deposited, Pearl Nickel Finishes for Interior Trim Applications in Automobiles [9]
D.C. McIntyre, G.G. Chen, E.C. Sprague, D.B. Humenik, and J.A. Kubinski, Vapor Technologies Incorporated, Longmont, CO .....51

Whither Decorative Coatings? [10]
S.W. Schulz, Surface Solutions, Inc., Enfield, CT .....57

Multifunctional Amorphous Carbon Based Coatings [11]
A. Hieke, K. Bewilogua, I. Bialuch, and K. Weigel, Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany .....63

Mechanical and Tribological Properties of Metal Containing Diamond-Like Carbon Coatings(Me-DLC) Deposited Under Different Plasma Confinement Conditions [12]
C. Strondl, G.J. van der Kolk, T. Hurkmans, and W. Fleischer, Hauzer Techno Coating BV, Venlo, The Netherlands; and N.M. Carvalho and J.T.M. de Hosson, University of Groningen, Groningen, The Netherlands .....67

PVD CrN/NbN Superlattice Coatings to Protect Components Used in the Textile Industry [13]
P.Eh. Hovsepian, and W.-D. Münz , Sheffield Hallam University, Sheffield, United Kingdom; B. Schlömer, Schlafhorst Part Service GmbH, Mönchengladbach, Germany; G. Gregory, CATRA, Sheffield, United Kingdom; and I.J. Smith, Bodycote SHU, Sheffield, United Kingdom .....72

Engineering Surfaces of Precision Steel Components [14]
G.L. Doll and B.K. Osborn, Timken Research, Canton, OH .....78

Reflector Coatings in Automobile Lighting—Their Performance Requirements, Substrates, Materials and Processing [15]
L. Xu, R.E. Goltz, J.L. Holbrook, and S.H. Passwater, Guide Corporation, Pendleton, IN .....85

Joint Vacuum Web/Optical Coating

Flexible Organic LED Displays [27]
M.S. Weaver, S.Y. Mao, J.K. Mahon, L.A. Michalski, T. Ngo, K. Rajan, M.A. Rothman, J.A. Silvernail, and J.J. Brown, Universal Display Corporation, Ewing, NJ; and W.E. Bennett, C. Bonham, P.E. Burrows, G.L. Graff, M.E. Gross, M. Hall, P.M. Martin, and E. Mast, Battelle Pacific Northwest Laboratory,
Richland, WA .....155

The Mechanical Reliability of Sputter-Coated Indium Tin Oxide Polyester Substrates for Flexible Display and Touchscreen Applications [28]
D.R. Cairns, D.C. Paine, and G.P. Crawford, Brown University, Providence, RI .....160

Gas Barrier Performances of Organic-Inorganic Multilayered Films [29]
T. Miyamoto, K. Mizuno, N. Noguchi, and T. Niijima, Technical Research Institute, Toppan Printing Co. Ltd., Saitama, Japan .....166

Thick Optical Multilayer Systems on PET-Film [30]
H.G. Lotz, P. Sauer, J. Schröder, and J. Trube, Applied Films GmbH, Alzenau, Germany .....172

Permeation Through Defects in Transparent Barrier-Coated Plastic Films [31]
G. Czeremuszkin and M. Latrèche, Polyplasma Inc., Montréal, Canada; and M.R. Wertheimer, École Polytechnique, Montréal, Canada .....178

Barrier Coatings on Plastic Web [32]
N. Schiller, S. Straach, M. Fahland, and C. Charton, Fraunhofer-Institute Elektronenstrahl-und Plasmatechnik, Dresden, Germany .....184

European Network on Surface Technologies [33]
R. Fellenberg, VDI Technology Center Physical Technologies, Duesseldorf, Germany .....189

Large Area Coating

The Evolution of Solar Infrared Reflective Glazing in Automobiles [34]
J.J. Finley, PPG Glass Technology Center, PPG Industries, Inc., Pittsburgh, PA .....193

Gas Inlet Systems for Large Area Linear Magnetron Sputtering Sources [35]
F. Milde, G. Teschner, and C. May, Von Ardenne Anlagentechnik GmbH, Dresden, Germany .....204

Further Steps in the Development of a Layer System Family Based on Twin Magnetron Sputtered Layers [36]
M. Ruske, M. Englert, J. Trube, and A. Zmelty, Applied Films GmbH and Co. KG, Alzenau, Germany .....210

Practical Aspects of High Power MF and DC Generators in Large Area Coating Systems [37]
T. Rettich and P. Wiedemuth, Hüttinger Elektronik GmbH & Co. KG, Freiburg, Germany .....214

Microstructural Comparison of Ag Films Grown on Amorphous TiO₂ and Polycrystalline ZnO [38]
R. Dannenberg and D. Glenn, AFG Development Corporation, Petaluma, CA; and E. Stach, Lawrence Berkeley Laboratory, Berkeley, CA .....218

Infrared and EMI Filter with Ultra-Low Resistivity and High Transmission [39]
A. Klöppel, H.G. Lotz, B. Meyer, and J. Trube, Applied Films Corporation GmbH, Alzenau, Germany .....225

A New Generation of Power Supplies for Large Area Dual Magnetron Sputtering [40]
D.J. Christie, D. Kovalevskii, D.E. Morgan, and E.A. Seymour, Advanced Energy Industries, Inc., Fort Collins, CO .....228

Optical Properties of Sputter Deposited Thin Silver Films [41]
P.A. Greene and P. Tausch, BOC Coating Technology, Fairfield, CA .....234

Arc Handling in Reactive DC Magnetron Sputter Deposition [42]
A. Blondeel and W. De Bosscher, Bekaert Advanced Coatings (Bekaert VDS), Deinze, Belgium .....240

Dynamic Behavior of Unipolar and Bipolar Pulsed Magnetron Sputtering [43]
M. List, U. Krause, and T. Wünsche, Fraunhofer Institut für Elektronenstrahl-und Plasmatechnik, Dresden, Germany .....246

Optical Coating

Recent Advances in Thin Film Interference Filters for Telecommunications [44]
N.A. O’Brien, M.J. Cumbo, K.D. Hendrix, R.B. Sargent, and M.K. Tilsch, JDS Uniphase, Santa Rosa, CA .....255

Estimating the Properties of DWDM Filters Before Designing and Their Error Sensitivity and Compensation Effects in Production [45]
R.R. Willey, Willey Optical Consultants, Charlevoix, MI .....262

Optical Coatings on Plastics by a New Plasma CVD Process [46]
F. Breme and J. Buttstaedt, GfE Metalle und Materialien GmbH, Nuremberg, Germany .....267

Large Area Deposition of Transparent and Conductive ZnO:Al Layers by Reactive Mid Frequency Magnetron Sputtering [47]
B. Szyszka, T. Höing, X. Jiang, A. Bierhals, N. Malkomes, M. Vergöhl, V. Sittinger, U. Bringmann, and G. Bräuer, Fraunhofer IST, Braunschweig, Germany .....272

Multilayer and Inhomogeneous Optical Filters Fabricated by PECVD Using Titanium Dioxide and Silicon Dioxide [48]
S. Larouche, and A. Amassian, École Polytechnique, Montréal, Canada; S.C. Gujrathi, Université de Montréal, Montréal, Canada; and J.E. Klemberg-Sapieha and L. Martinu, École Polytechnique, Montréal, Canada .....277

Enhanced Optical Properties of Engineered Porous Thin Films Using Nematic Liquid Crystals [49]
S.R. Kennedy, J.C. Sit, and M.J. Brett, Department of Electrical and Computer Engineering, University of Alberta, Alberta, Canada; and D.J. Broer, Philips Research Laboratories, Eindhoven, The Netherlands .....282

A New High-Rate Deposition Process for Scratch- and Wipe-Resistant Coatings for Optical and Decorative Plastic Parts [50]
R. Beckmann, K.-D. Nauenburg, T. Naumann, U. Patz, G. Ickes, and H. Hagedorn, Leybold Optics GmbH, Hanau, Germany; and J. Snyder, Leybold Optics USA Inc., Cary, NC .....288

Spectroscopic Ellipsometry in Optical Coatings Manufacturing [51]
J.N. Hilfiker, J.S. Hale, B.D. Johs, T.E. Tiwald, R.A. Synowicki, C.L. Bungay, and J.A. Woollam, J.A. Woollam Co., Inc., Lincoln, NE .....295

Tribological Properties of PECVD Optical Coatings [52]
M.-A. Raymond, S. Larouche, O. Zabeida, L. Martinu, and J.E. Klemberg-Sapieha, École Polytechnique, Montréal, Canada .....301

Optimum Location of the Evaporation Source: Experimental Verification [53]
I.C. Stevenson and G. Sadkhin, Denton Vacuum, LLC, Moorestown, NJ .....306

Design Principles of Ultra-Narrow Band Filters for WDM Applications [54]
C.K. Carniglia, OCLI, Santa Rosa, CA .....314

Considerations and Examples for Determining Precision of Indirect Optical Monitoring [55]
D.E. Morton, Denton Vacuum, LLC, Moorestown, NJ .....324

Evanescent Waves and Some of Their Applications [56]
H.A. Macleod and C. Clark, Thin Film Center Inc., Tucson, AZ .....328

Inhomogeneities in Y₂O₃ and CeO₂ Optical Films [57]
V. Janicki and H. Zorc, Rudjer Boskovic Institute, Zagreb, Croatia .....334

Plasma Processing

Mass Spectrometric Characterization of Pulsed Plasmas for Deposition of Thin Polyethylene Glycol-Like Polymer Films [58]
V.A. Shamamian, D.D. Hinshelwood, and D.C. Guerin, Naval Research Laboratory, Washington, DC; and F.S. Denes and S. Manolache, Center for Plasma Aided Manufacturing, Madison, WI .....341

Surface Modification of Biaxially Oriented Polypropylene (BOPP) in Dielectric Barrier Discharges (DBD) at Atmospheric Pressure [59]
S. Guimond and I. Radu, École Polytechnique, Montréal, Canada; G. Czeremuszkin, Polyplasma Inc., Montréal, Canada; D.J. Carlsson, National Research Council of Canada, Ottawa, Canada; and M.R. Wertheimer, École Polytechnique, Montréal, Canada .....347

Plasma Polymerization: For Industrial Production [60]
S. Gaur and G. Vergason, Vergason Technology Inc., Van Etten, NY .....353

New Plasma Processes from Low Vacuum to Ambient Pressure in CYRANNUS Plasma Source [61]
H. Sung-Spitzl and R. Spitzl, iplas Innovative Plasma Systems GmbH, Cologne, Germany .....357

Plasma-Target Interaction in Reactive Sputtering [62]
R. De Gryse and D. Depla, State University Ghent, Ghent, Belgium .....361

Effect of Sputtering Gas Composition on Low Temperature Deposition of Polycrystalline Silicon Films [63]
K. Xu and S.I. Shah, University of Delaware, Newark, DE .....371

Experience with High Power DC Supplies with Fast Arc Suppression in Large Area Coating [64]
F. Milde, D. Schulze, and G. Teschner, Von Ardenne Anlagentechnik GmbH, Dresden, Germany; P. Wiedemuth and T. Rettich, Hüttinger Elektronik GmbH, Freiburg, Germany .....375

Characterization of Arc Discharge Plasmas in the Combined Steered Arc/Unbalanced Magnetron Deposition Process [65]
A.P. Ehiasarian, K.A. Macak, C. Schönjahn, R. New, and W.-D. Münz, Materials Research Institute, Sheffield Hallam University, Sheffield, United Kingdom .....382

High Current Density Anode Layer Ion Sources [66]
J.E. Keem, Applied Ion Beam Group, Bloomfield Hills, MI .....388

Tribological & Wear Coating

Molecular Engineering of Diamond-Like Carbon Films for Super-Low Friction and Wear Properties [67]
A. Erdemir, Argonne National Laboratory, Argonne, IL 397

Quantitative Evaluation of Adhesive Toughness and Improvement of Wear-Resistant Performance of CVD Diamond Coatings [68]
H. Takahashi and S. Kamiya, Tohoku University, Sendai, Japan; H. Liu, OSG Corporation, Toyokawa, Japan; and M. Saka and H. Abé, Tohoku University, Sendai, Japan .....403

High Vacuum Based Deposition of Carbon-Based Films for Industrial Applications [69]
M. Grischke, R. Herb, O. Massler, J. Karner, and H. Eberle, Balzers Limited, Balzers, Liechtenstein .....407

Upscaling Effect in Design of Hybrid Units for Tribological Coatings [70]
P. Maurin-Perrier, C. Heau, and J.M. Poirson, HEF, Andrezieux-Boutheon, France; and K. Metzgar, HEF USA, Columbus, OH .....411

Recent Developments of AlTiN Coatings and Introduction of a Special Tool Coating System [71]
T.G. Krug, J. Vetter, V. von der Heide, and A. Mohnfeld, Metaplas Ionon, Bergisch Gladbach, Germany .....415

Protective Coatings 2001: Chemistry and Applications [72]
R.E. Ellwanger, M. G. Mikhael, and A. Yializis, Sigma Technologies Int’l Inc. Tucson, Arizona .....418

Vacuum Web Coating

The Use of Vacuum Deposited Coatings for Security Applications [73]
C.A. Bishop, C.A. Bishop Consulting Ltd., Middlesbrough, United Kingdom .....425

Development of Three-Layer OVD Coating Based on Dual-Magnetron Reactively Sputtered Dielectric Films [74]
I. Glick, Identicard Limited, Toronto, Canada; J.A. Dobrowolski, NRCC, Ottawa, Canada; and M. Fahland, P. Karlsson, and W. Seltmann, FEP, Dresden, Germany .....431

Novel Route for the Production of High Performance Pigments [75]
A.M. Pitt and R.H. Bennett, DERA, Malvern, United Kingdom; and D.E. Higgins, HC Ltd., Whitby, United Kingdom .....438

Semi-Transparent Optical Coating for Security Holograms [76]
N.A.G. Ahmed and M. Whitnall, Valmet General Ltd., Heywood, United Kingdom .....444

Growth and Characterization of Transparent Metal Oxide and Oxynitride Gas Barrier Films on Polymer Substrates [77]
A.G. Erlat, B.M. Henry, R.P. Howson, C.R.M. Grovenor, and G.A.D. Briggs, University of Oxford, Oxford, UK; and Y. Tsukahara, Toppan Printing Co., Ltd., Saitama, Japan. .....448

Decorative Colored Films for High-Speed Vacuum Web Coating [78]
M.G. Mikhael and A. Yializis, Sigma Technologies International Inc., Tucson, AZ .....455

European Thematic Network "Vacuum Coating of Polymer Films for Packaging and Technical Applications" [79]
U. Moosheimer, A. Melzer, and H-C. Langowski, Fraunhofer Institute for Process Engineering and Packaging, Freising, Germany .....458

Metallization of Emerging Materials [80]
F. Rimediotti, Galileo Vacuum Systems, Prato, Italy; and P. Raugei, Galileo Vacuum Systems, East Granby, CT .....464

The Permeation of Water Vapor Through Gas Barrier Films [81]
B.M. Henry, A.G. Erlat, C.R.M. Grovenor, C.-S. Deng, and G.A.D.Briggs, University of Oxford, Oxford, United Kingdom; and T. Miyamoto, N. Noguchi, T. Niijima, and Y.Tsukahara, Toppan Printing Co., Ltd., Saitama, Japan .....469

Structural Studies of Hyper-Thin SiO₂ and Si₃N₄ Coatings on Polymers [82]
G. Dennler and M.R. Wertheimer, École Polytechnique, Montréal, Canada; A. Houdayer, Université de Montréal, Montréal, Canada; and Y. Ségui, Université Paul Sabatier, Toulouse, France .....476

rf Plasma Tool for Ion-Assisted Large-Scale Web and Sheet Processing [83]
M. Geisler, J. Bartella, G. Hoffmann, R. Kukla, R. Ludwig, and D. Wagner, Applied Films GmbH & Co. KG, Alzenau, Germany .....482

Durability and Defect Distribution of SiOx Film on Polymer Substrate Analyzed by a Statistical Approach [84]
M. Yanaka and Y. Tsukahara, Technical Research Institute, Toppan Printing Co., Ltd., Saitama, Japan; and T. Okabe and N. Takeda, Graduate School of Frontier Sciences, The University of Tokyo, Tokyo, Japan .....487

Web Substrate Heating and a Thermodynamic Calculation Method for Li Film Thickness in a Thermal Evaporation System [85]
J. Affinito, Moltech Corporation, Tuscon, AZ; M.J. McCann, McCann Science, Chadds Ford, PA; and C. Sheehan and S. Bullock, Moltech Corporation, Tucson, AZ .....492

Vendor Session

Increase Vacuum Processing Throughput and Yield Using Advanced Downstream Pressure Control Methods [86]
P.M. Cederstav, Nor-Cal Products, Inc., San Diego, CA 501

Transparent Conductive Film of ARTON [87]
S.Zen and H.Shinohara, JSR Coporation, Ltd., Tokyo, Japan 503

Improved Sputter Deposition Hardware [88]
W. De Bosscher and P. Verheyen, Sinvaco, Zulte, Belgium 505

Rapid Prototyping Center for the Design, Manufacture, and Assessment of Multi-Layer Coatings [89]
A.M. Pitt, P.N. Raven, and R.H. Bennett, DERA, Malvern, United Kingdom 508

E-Commerce and the Coating Industry: Using Information Technology to Satisfy the Unique Operational Demands of the Global Coating Industry [90]
S.R. Yializis and T.A. Selden, Coatingsnet.com, Tuscon, AZ 509

Model 6000 Multifunctional Coating System [91]
J.A. Carlotto, Carlotto & Associates, Inc., Barrington, RI 515

SATIS SP 100—Compact Sputtering System [92]
G. Chester, Satis RTC Photonics Systems Ltd., Biggleswade, United Kingdom 516

Low Cost Dry Vacuum Pumps for Coating Applications [93]
J. Fabrizio, Leybold Vacuum USA, Export, PA 517

A New Deposition System Platform from Denton Vacuum [94]
J.J. Crowe, G.J. Lutz, and R. Wang, Denton Vacuum LLC, Moorestown, NJ 518