2000 43rd Technical Conference Proceedings

Note: Number in brackets on the top line is the paper number for 2000.

Plenary Session

Ion Beam Sources, Past, Present and Future [1]
P.D. Reader, Ion Tech Inc., Fort Collins, CO.....3

Determining Film Density from Index of Refraction Measurements [2]
F. Krannig, Applied Films Corporation, Longmont, Colorado.....7

In-situ Spectroscopic Ellipsometry and Plasma Control for Large-Scale Magnetron Sputter Deposition Processes [3]
M. Vergöhl, N. Malkomes, T. Matthée and G.Bräuer, Fraunhofer Institute for Surface Engineering and Thin Films, Germany; U. Richter, Sentech Instruments GmbH, Germany; F.-W. Nickolc, Semco Glasbeschichtung GmbH, Germany; and J. Bruch, Balzers Process Systems, Germany.....11

Automated Control for Production of High Precision Vacuum Deposited Optical Coatings [4]
D. Gibson, J. Gardner and G. Chester, RTC Systems Ltd., Biggleswade, United Kingdom.....17

Vacuum Instrument Calibration and Personnel Training Boost Productivity [5]
S.P. Hansen, MKS Instruments, Andover, MA.....23

Troubleshooting Vacuum Pumping Systems [6]
P.D. Vibert, Tuthill Corporation/Kinney Vacuum Division, Canton, MA.....27

The Ion Surface Engineering Program at Southwest Research Institute: Ion Implantation and Coating Deposition via PIII and PIIP [7]
K.C. Walter and J.H. Arps, Southwest Research Institute, San Antonio, TX; and M. Nastasi and X.M. He,
Los Alamos National Laboratory, Los Alamos, NM.....37

Corrosion Characterization of Arc Deposited Zirconium Nitride Coatings by DC Electrochemical Techniques [8]
W.K. Grant, Vapor Technologies Inc., Boulder, CO; and B. Mishra, Colorado School of Mines, Golden, CO.....41

Surface Oxidation of Decorative Hard Coatings with Enriched Carbon Content [9]
W. Fleischer and T. Trinh, Hauzer Coating Centrum BV, The Netherlands; G.J. van der Kolk and T. Hurkmans, Hauzer Techno Coating BV, The Netherlands; and P. Willich, Fraunhofer Institute for Surface Engineering and Thin Films, Germany.....46

Colour Trends in PVD [10]
M.H. Bouix and C.P. Dumortier, Ionitec S.A., France.....52

Cathodic Arc Coatings for Mass Produced Items [11]
M. Chhowalla, University of Cambridge, Department of Engineering, Cambridge, United Kingdom.....55

The Chemistry of Thin Film Color [12]
J.A. Carlotto, Vacuum Process Technology, Inc., Pembroke, MA.....58

Establishing Cleanliness "Up Front" [13]
F.J. Fuchs, CAE Cleaning Technologies, Jamestown, NY.....61

Principles of In-line System Designing for Protective and Decorative Coating [14]
E. Yadin and Y. Lipin, Sidrabe, Inc., Latvia.....65

New Developments of PVD—Layers onto Metallic Sheets and Strips [15]
C. Metzner, B. Scheffel and F.-H. Roegner, Fraunhofer-Institut fuer Elektronenstrahl-und Plasmatechnik (FEP), Germany.....68

New Developments in Cluster In-line Coating of Decorative Parts [16]
D. Hofmann, B. Hensel and S. Kunkel, Balzers SCI GmbH, Germany; and N. Brokenshire, SCI, Canada.....74

AC Reactive Sputtering with Inverted Cylindrical Magnetrons [17]
D.A. Glocker, Isoflux Incorporated, Rush, NY; and V.W. Lindberg and A.R. Woodard, Rochester Institute of Technology, Rochester, NY.....81

Pulsed-DC Reactive Sputtering of Dielectrics: Pulsing Parameter Effects [18]
A. Belkind and Z. Zhao, Stevens Institute of Technology, Hoboken, NJ; and D. Carter, L. Mahoney, G. McDonough, G. Roche, R. Scholl and H. Walde, Advanced Energy Industries, Inc., Fort Collins, CO.....86

The Coating of Internal Surfaces Using a New Cylindrical Magnetron [19]
B. Clayton, M. Jarratt and D.G. Teer, Teer Coatings Ltd., United Kingdom.....91

Sputtering of Silicon Nitride for Use in Crystalline Silicon Solar Cell Technology [20]
J. Krempel-Hesse, Balzers Process Systems GmbH, Germany; and R. Preu, H. Lautenschlager and R. Lüdemann, Fraunhofer ISE, Germany.....97

Plasma-Assisted Deposition at Atmospheric Pressure Using Dielectric Barrier Discharges [21]
C.-P. Klages, K. Höpfner, N. Kläke and R. Thyen, Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany.....100

Gas-Flow-Sputtering for Vapor Deposition and Cluster Deposition [22]
K. Ishii and H. Hamakake, Department of Electric and Electronic Engineering, Utsunomiya University, Japan.....107

Fused Hollow Cathode for Cold Atmospheric Plasma Processing [23]
H. Baránková and L. Bárdos, Uppsala University, Ångström Laboratory, Sweden.....113

PVD Problems in Need of Solutions [24]
T. Van Vorous, VCC, Ltd., Boulder, CO.....116

The Influence of the Barrier Layer on the Mechanical Properties of IR-Reflecting (low-E) Multilayer Systems on Glass [25]
O. Treichel, V. Kirchhoff and G. Bräuer, Fraunhofer Institut für Elektronenstrahl-und
Plasmatechnik, Germany.....121

Modeling of Production Scale Reactive Deposition of a Cylindrical Magnetron [26]
P.A. Greene and R. Dannenberg, BOC Coating Technology, Fairfield, CA.....127

The Economic Advantages of Gap Reduction for an Architectural Glass Coater [27]
J. Madocks, Applied Process Technologies, Inc., Tucson, AZ; M. Abbott, Applied Process Technologies, Inc., Northfield, MN; and C. Lemme, Applied Process Technologies, Inc., Tucson, AZ .....133

Magnetron Sputtering of ITO and ZnO Films for Large Area Glass Coating [28]
C. May, J. Strümpfel and D. Schulze, Von Ardenne Anlagentechnik GmbH, Germany.....137

Considerations for the Design of a Flat Glass Washing Machine in an Automatic Large Area Coating Line [29]
B. Greenyer, Benteler Mechanical Engineering, Charlotte, NC.....143

MF, DC and Pulsed DC in Practical Use for Large Area Coating [30]
T. Rettich and P. Wiedemuth, Hüttinger Elektronik GmbH & Co. KG, Germany.....147

New Aspects of EB-PVD for Large Area Coating of Metal Strips [31]
E. Reinhold, J. Richter, U. Seyfert and B.-D. Wenzel, Von Ardenne Anlagentechnik GmbH, Germany.....153

Smart Switchable Materials for the New Millennium—Windows and Displays [32]
C.M. Lampert, Star Science, Santa Clara, CA.....165

Applying Combinatorial Chemistry Methodology to Optimizing the Growth of Indium Tin Oxide on Polymeric Substrates [33]
R.E. Treece, I. Eisgruber, R. Hollingsworth, J. Engel and P. Bhat, Materials Research Group (MRG), Inc., Wheat Ridge, CO.....171

Search for High Index PECVD Optical Coating Materials: The Case of Titanium Dioxide [34]
L. Martinu, M. Latrèche, V. Hajek and J.E. Klemberg-Sapieha, École Polytechnique, Canada; and A. Argoitia and W.T. Beauchamp, Optical Coating Laboratory Inc., Santa Rosa, CA.....177

Thin Film Optical Materials for Use in Microtechnology [35]
P.M. Martin, D.W. Matson, W.D. Bennett, J.W. Johnston, Pacific Northwest National Laboratory, Richland, WA .....181

Properties of TCO-Films Prepared by Reactive Magnetron Sputtering [36]
B. Szyszka, Fraunhofer IST, Germany.....187

LPCVD of Optical Interference Coatings for Micro-Optical Applications [37]
M.A. George and D.Z. Rogers, Deposition Sciences Incorporated, Santa Rosa, CA.....193

Envelopes in Optical Coating Design [38]
A. Macleod and C. Clark, Thin Film Center Inc., Tucson, AZ.....197

A Versatile Plasma Source for Thin Film Processing Applications [39]
D. Gibson, D. Yates and J. O’Driscoll, RTC Systems Ltd., United Kingdom; and J. Allen, Advanced Technology Coatings Ltd., United Kingdom.....203

The Effects of Pumping Speed on the Operation of a Cold Cathode Ion Source [40]
D.E. Morton, Denton Vacuum, LLC, Moorestown, NJ.....207

Development of Intrinsically Conductive Antireflection Coatings for the Ophthalmic Industry [41]
R. Blacker, D. Bohling, M. Coda and M. Kolosey, SOLA International, Petaluma, CA; and N. Marechal, SOLA International, Lonsdale, Australia ....212

Multiple Filament Electron Gun for Industrial Applications of Vacuum Thin Film Deposition [42]
J.W. Moore, Thermionics, Modesto, CA....217

High Quality Low Cost Optical Coatings [43]
C. Misiano, G. Leonardi, S. Mengali and P. Sartori, Centro Tecnologie del Vuoto, Italy....219

Abrasion Resistant and Optical Thin Film Coatings for Ophthalmic Lenses [44]
D. Bohling, M. Coda, R. Blacker, C. Burton and R. Gove, SOLA International, Petaluma, CA; and
P. Murphy, I. Threlfall and F. Samson, SOLA International, Australia....222

Design of Optical Coatings Taking Consideration of Probable Production Errors [45]
R.R. Willey, Willey Optical, Consultants, Charlevoix-the-Beautiful, MI....230

Nano- and Micromechanical Characterization of Optical Coatings Fabricated by PECVD [46]
J.E. Klemberg-Sapieha, S. Dahl and L. Martinu, Groupe des Couches Minces and Department of Engineering Physics and Materials Engineering, École Polytechnique, Canada....234

Environmentally Stable UV Raman Edge Filters [47]
T.R. Jensen, R.L. Johnson, Jr., J. Ballou, W. Prohaska and S.E. Morin, Omega Optical, Inc., Brattleboro, VT....239

High Precision Deposition of Oxide Coatings [48]
G. Clarke, R. Adair, R. Erz, B. Hichwa, H. Hung, P. LeFebvre, G. Ockenfuss, B. Pond, I. Seddon, C. Stoessel and D. Zhou, Optical Coating Laboratory, Inc. (OCLI), Santa Rosa, CA....244

The Reliability of ITO Thin Films with Topcoat on Chip-on-Glass Process [49]
Y.M. Huang, J.Y. Yew and J.M. Ni, Wintek Corporation, Taiwan....250

Thin Film Interference Filter for 45° Angle of Incidence inside a Glass Prism with Extremely Low Polarization Dependence [50]
D. Cushing, JDS Uniphase Corporation, Nepean, Ontario, Canada....252

Plasma Polymerized Thin Films for Corrosion Control on Electronic Devices [51]
M.F. Nichols, Atomic Paint Shop Inc., Columbia, MO....261

Plasma Polymerizatio:Theory and Practice [52]
S. Gaur and G. Vergason, Vergason Technology, Inc., Van Etten, NY....267

Results of Plasma and Ion Beam Characterization with Regard to Web Treatment Application [53]
F. Milde, J. Richter, J. Strümpfel and H. von der Waydbrink, Von Ardenne Anlagentechnik GmbH, Germany....272

Phosphorous Containing Flame Retardant Plasma Polymer Layers [54]
J.P.S. Badyal and J.M. Crowther, Department of Chemistry, Science Laboratories, Durham University,
United Kingdom....280

Characterization of the Low-Voltage, High-Current Single-Cell Ion Source [55]
A. Shabalin, M. Amann, M. Kishinevsky, C. Quinn and N. Capps, Advanced Energy Industries, Fort Collins, CO....283

New DC Sputter Sources for the Large Scale Deposition of Oxide Films [56]
M. Höfer, A. Jung, T. Jung, H.-U. Kricheldorf and F. Schmidt, Fraunhofer-Institut für Schicht-und Oberflächentechnik (IST), Germany....287

Developments in PVD Tribological Coatings [57]
A. Matthews and A. Leyland, Research Centre in Surface Engineering, The University of Hull,
United Kingdom....295

Efficient Deposition Technique for Diamond-Like Carbon Coatings [58]
A. Hieke, K. Bewilogua, K. Taube, I. Bialuch and K. Weigel, Fraunhofer Institute for Surface Engineering and Thin Films (IST), Germany....301

Highly Flexible Coating System for Tribological and Wear Coatings [59]
P. Maurin-Perrier, C. Heau and J.M. Poirson, HEF, Andrézieux-Bouthéon, France; and K. Metzgar, HEF USA, Columbus, OH....305

Tribological Applications of Amorphous Carbon and Crystalline Diamond Coatings [60]
L. Schaefer, J. Gaebler, S. Mulcahy, J. Brand, A. Hieke and R. Wittorf, Fraunhofer Institute for Surface Technology and Thin Films (IST), Germany....311

Surface Characterization of Sized Carbon Fibers Used in Fiber/Polymer Matrix Composites [61]
N. Dilsiz, Roketsan, Turkey; and J. Wightman, Virginia Tech, Blacksburg, VA....316

Stable High Rate Reactive Al₂O₃ Deposition [62]
D. Lishan, S. Onishi, D. Johnson and A. Lateef, Plasma-Therm, Inc., St. Petersburg, FL....321

Solar Control Window Films—A Historical and Technological Perspective [63]
S. Barth, CPFilms, Inc., Martinsville, VA; and H. Memarian, CPFilms, Inc., Canoga Park, CA....329

Vacuum Heat Transfer Models for Web Substrates: Review of Theory and Experimental Heat Transfer Data [64]
M. Roehrig and C. Bright, Presstek Inc., Tucson, AZ; and D. Evans, Silicon Valley Group Inc., Scotts Valley, CA....335

Adhesion Promotion Technique for Coatings on PET, PEN, and PI [65]
D.J. McClure, D.S. Dunn and A.J. Ouderkirk, 3M Company, St. Paul, MN....342

Comparative Study of Oxygen Permeation Through Polymers and Gas Barrier Films [66]
H. Nörenberg and C. Deng, University of Oxford, Department of Materials, United Kindgom; H.-J. Kosmella, GKSS Geesthacht/Teltow, Germany; B.M. Henry, University of Oxford, Department of Materials, United Kindgom; T. Miyamota and Y. Tsukahara, Technical Research Institute, TOPPAN Printing Company, Japan; and G.D.W. Smith and G.A.D. Briggs, University of Oxford, Department of Materials, United Kingdom....347

Novel Transparent Gas Barrier Film Prepared by PECVD Method [67]
M. Komada, T. Oboshi and K. Ichimura, Central Research Institute, Dai Nippon Printing Company, Ltd., Japan....352

Roll-to-Roll Deposition of Multilayer Optical Coatings onto Plastic Webs [68]
M. Fahland, V. Kirchhoff, C. Charton and P. Karlsson, Fraunhofer Institut Elektronenstrahl-und Plasmatechnik (FEP), Germany....357

Large Scale Electron Beam Web Coating Not Only for Packaging [69]
W. Lohwasser, Lawson Mardon Packaging Services Ltd., Switzerland....362

A Ceramic (SiO₂-Al₂O₃ mixture) Coated Barrier Film by Electron Beam Evaporation [70]
T. Ohya, S. Suzuki, M. Yoshimoto, K. Iseki, S. Yokoyama and H. Ishihara, Toyobo Co., Ltd. Research Center, Japan....368

Microstructural and Gas Barrier Properties of Transparent Aluminium Oxide and Indium Tin Oxide Films [71]
B.M. Henry, A.G. Erlat, C.R.M. Grovenor and G.A.D. Briggs, Department of Materials, University of Oxford, United Kingdom; and Y. Tsukahara, T. Miyamoto, N. Noguchi and T. Niijima, Technical Research Institute, Toppan Printing Co., Ltd., Japan....373

Long Lasting Surface Activation of Polymer Webs [72]
W. Decker, S. Pirzada, M. Michael and A. Yializis, Sigma Technologies International, Inc., Tucson, AZ....379

Permeation of Oxygen, Water Vapor and Aroma Substances Through Vacuum Web Coated Films [73]
U. Moosheimer, H.-C. Langowski and A. Melzer, Fraunhofer-Institute for Process Engineering and Packaging (IVV), Germany....385

Key Attributes of a Successful Metallizable OPP Web: a Converter’s Perspective [74]
W. Forrister and L. Duckwall, Printpack, Inc., Atlanta, GA....391

Fabrication of OLED Devices on Engineered Plastic Substrates [75]
G.L. Graff, M.E. Gross, M.G. Hall, E.S. Mast, C.C. Bonham, P.M. Martin and M.K. Shi, Battelle Pacific Northwest National Laboratory, Richland, WA; J. Brown and J. Mahon, Universal Display Corporation; P. Burrows, Princeton University; and M. Sullivan, Vitex Systems Incorporated....397

A New Advanced Power Supply for Resistance Heated Evaporator Boats, Used in Standard Roll Coaters [76]
G. Loebig, A. Weis and A. Lambert, Balzers Process Systems GmbH, Germany....401

Ultra High Barrier Films [77]
A. Yializis, M.G. Mikhael and R.E. Ellwanger, Sigma Technologies International Inc., Tucson, AZ....404

Permeation Through Defects in Transparent Barrier Coated Plastic Films [78]
G. Czeremuszkin and M. Latrèche, Polyplasma Inc., Canada; and M.R. Wertheimer, École Polytechnique, Canada....408

European Metallizers Association (EMA): an Overview about the European Metallizing Industry [79]
W. Geitner, Hueck Folien GmbH, Austria (representing the technical committee of EMA)....414

Some Aspects of System Design for Roll-to-Roll Vacuum Coating Machines [80]
C.A. Bishop, C.A. Bishop Consulting Ltd., United Kingdom....417

X-1 Silver: A High Durability Silver Coating for Use in Harsh Environments [81]
I.C. Stevenson and G. Sadkhin, Denton Vacuum, LLC, Moorestown, NJ....425

R&D Services for the Vacuum Web Coating Industry [82]
N. Schiller and M. Fahland, Fraunhofer Institut Elektronenstrahl-und Plasmatechnik (FEP), Germany....426

Silver and Silver Alloy Targets for Sputtering Applications [83]
A.M. Reti, Handy & Harman, Fairfield, CT....427

Surface Profiling Enhancement on Sputter and Arc Deposition Targets [84]
A.H. Plaisted, Soleras Ltd., Biddeford, ME....428

Hostaphan^® RHB 12—New Barrier Applications [85]
R. Davis, Mitsubishi Polyester Film GmbH, Germany....429

WESEECO LLC Introduces Unique Educational Courseware for the Process Industries [86]
D.F. Evans and J.M. Wheeler, WESEECO LLC, Minneapolis, MN....430

RTC Systems—The Vacuum System Integrators [87]
G. Chester, RTC Systems Ltd., United Kingdom....431

Reducing Pump-Down Time with Dry Air Venting [88]
M.J. Lunger and G.E.Vergason, Vergason Technology Inc., Van Etten, NY....432

Cost Comparison Between Various Vacuum Coaters Used in the Automotive Lighting Industry [89]
S. Fanfani and F. Rimediotti, Galileo Vacuum Systems, Italy....433

AVAC 430—Equipment and Process for Automated, In-line, EMI and ESD Coating on Plastic [90]
U. Blomquist and J. Nordlander, Applied Vacuum i Linköping AB, Sweden....437

Synchronous Processing of Vacuum Metalized and HMDSO Coatings with Press-Side^® Rapid Cycle Coating Systems [91]
J. Grover, Vergason Technology, Inc., Van Etten, NY....438

An In-Line Coating System for Precision Optics [92]
R.C. Eriksson and S.W. Schulz, Vacuum Process Technology, Inc., Pembroke, MA....439

Applications for the Delta Glow™ High Energy Plasma Source [93]
S. Simons, Manitou Systems Inc., Danbury, CT....440