2012 Webinar Tutorial Program
Convenient, Relevant, Interactive, and Affordable Education Opportunities
The SVC Webinar Program is a convenient approach to education, featuring SVC's most popular tutorials, covering topics relevant to technical staff and operators. These Webinars are presented by recognized professionals in the vacuum coating community and allow participants the ability to interact with the instructor during the live presentation. This on-line Webinar format offers an affordable option to individuals and companies seeking to fit meaningful training into a short period of time. SVC offers both live and on-demand versions of webinars.
Current Webinar Offerings:
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Live Webinar SOLD OUT! "Sputter Deposition" SVC Course ID: W-208 Webinar Description and Topical Outline |
Live Webinar "Basics of Vacuum Web Coating" Webinar Description and Topical Outline Registration is Now Open! |
Special Offer:
Register five or more employees from your company and receive a discount!
Contact SVC at 505/856-7188 or svinfo@svc.org for details
Become a Member Today and Receive the Discounted Member Rate.
On-Demand Webinar
"Practical Aspects of Plasma Modification
of Polymer Materials and Plasma Web Treatment"
Recording of the Live Webinar
Originally Presented December 9, 2011
SVC Course ID: W-314
Instructor: Jeremy Grace, Eastman Kodak
Pricing:
3-hour On-Demand Webinar
Member: $195 | Non-Member: $270
Webinar Description and Topical Outline
Webinar Description:
This webinar emphasizes issues of practical importance to those using sputtering as a manufacturing process. It is intended for engineers, scientists and technicians who would like an understanding of the factors that influence product throughput, coating quality, and process robustness and reliability.
The primary focus will be on the use of planar magnetrons of various shapes, but other sources will be covered as well. The relationships between the sputtering conditions and important film properties - such as microstructure, composition, stress, and adhesion - will be discussed. New developments that are finding their way into practical applications will also be highlighted. No prior formal training in sputtering is required.
- Sputtering plasmas and the nature of the sputtering process
- Film nucleation and growth
- Effects of substrate temperature and energetic bombardment of film structure
- Coating stress and the causes of stress
- Biased sputtering and the use of unbalanced magnetrons
- Sources of substrate heating
- rf, dc, pulsed dc, and ac reactive sputtering
- Process control methods for reactive sputtering of dielectrics
- Arcing, disappearing anodes, and other process stability issues
- High Power Pulsed Magnetron Sputtering (HPPMS or HIPIMS)
1 Sputtering plasmas
1.1 Ionization due to electron impact
1.2 Creation of secondary electrons at the target
1.3 Conditions for a self sustaining glow discharge
1.4 The use of magnetic fields and magnetrons to increase ionization
1.5 Typical magnetron plasma properties
1.6 Magnetron cathode configurations
2 Energy and spatial distribution of sputtered material
2.1 The collision cascade in the target
2.2 Sputter yields
2.3 Energy distribution of sputtered atoms
2.4 The cosine spatial distribution of sputtered atoms
3 Deposition rates and substrate heating
3.1 Dependence of rate on voltage and current
3.2 Indirect and direct target cooling
3.3 Major sources of substrate heating
3.4 Estimate of the energy per sputtered atom
4 Film nucleation and growth
4.1 Nucleation and the critical radius
4.2 Effect of temperature on nucleation and growth
4.3 Effect of surface mobility on nucleation and growth
4.4 Relationship between sputtering conditions and surface mobility
4.5 Structure zone models
4.6 Coating stress and stress measurement
4.7 Relationship between sputtering conditions and stress
4.8 Bias sputtering
4.9 Unbalanced magnetron sputtering
5 Reactive sputtering of insulating materials
5.1 Overview of reactive sputtering
5.2 Process control issues in reactive sputtering
5.2.1 Maintaining correct stoichiometry
5.2.2 Target poisoning and hysteresis
5.2.3 Arcing
5.2.4 Hidden anodes
5.3 Partial pressure vs. flow control in reactive sputtering
5.4 Methods of partial pressure control
5.5 Methods of reducing or eliminating arcing
5.5.1 Pulsed dc sputtering
5.5.2 Dual cathode ac sputtering
Instructor Biography:
David Glocker is CEO of Isoflux Incorporated, a manufacturer of magnetron equipment, which he founded in 1993. He has more than 20 years’ experience in thin film research, development, and manufacturing and has taken a number of new processes from laboratory-scale feasibility studies through successful production. He is an inventor or co-inventor of 25 U.S. patents and an author of more than 25 research papers in the areas of sputter source design, plasmas and plasma characteristics, sources of substrate heating in sputtering, and the control of sputtering processes and sputtered film properties. He also is the co-editor of The Handbook of Thin Film Process Technology, a major reference work in the field.
W-314 "Practical Aspects of Plasma Modification of Polymer Materials and Plasma Web Treatment"
Webinar Description:
This Webinar emphasizes issues of practical importance for those who use plasma modification techniques to treat polymers in the manufacturing or research environments. It is intended for engineers, scientists, and technicians who would like to gain a better understanding of the influence of plasma process factors on treatment performance, as well as the practical issues related to process robustness, process speed, and ease of scale-up. While much of the focus is on treatment of polymer webs, the key concepts presented are applicable to polymer surfaces in general and plasma treatment of materials in general.
-Industrial Applications of Plasmas for Polymer Surface Modification
-Effects of Plasmas on Polymer Surfaces
-Practical Aspects of Plasma Modification
-Practical Testing of Plasma-Treated Surfaces and Interfaces
Topical Outline:
1. Industrial Applications
• Definitions, applications & themes
• Examples of industrial applications
2. Effects of Plasmas on Polymer Surfaces
• Plasma basics
• Polymer chemistry basics
• Chemical changes in treated surfaces
• Physical changes in treated surfaces
3. Practical Aspects of Plasma Modification
• The concept of treatment dose
• Process factors and their roles
• Treatment process scaling
• Identifying promising treatment chemistries
• Plasma modification examples
- Silver-PET adhesion
- Gelatin-PEN adhesion
- Atomic Layer Deposition on Polymers
• Process verification and stability
4. Practical Testing of Plasma-Treated Surfaces and Interfaces
• Non-linear responses (relevant to surface saturation effects)
• Wetability/coatability
• Adhesion and fracture toughness
• Chemical stability of adhesive joints
Instructor Biography:
Jeremy M. Grace is currently a senior principal scientist at the Eastman Kodak company. At Kodak, he has worked in the areas of plasma surface modification, thin-film adhesion, sputter deposition, and organic vapor deposition. He has written several patents and journal articles in the area of plasma modification of polymers. He is a member of the Society of Vacuum Coaters and the American Vacuum Society, and served as chair of the Upstate New York Chapter of the AVS (UNY-VAC) from 1998 - 2000.
This webinar is intended for roll coater machine operators, maintenance personnel, technicians, engineers, scientists, supervisors, and others who would benefit from an introduction to issues related to roll-to-roll vacuum coating onto polymer substrates. This webinar will emphasize practical aspects of the topics, and the treatment will be descriptive with little mathematics used. The webinar focuses strongly on coatings made by resistance evaporation but touches on e-beam evaporation and sputter coating. If your primary interest is sputtering onto webs, please see our full-day course, “Sputter Deposition onto Flexible Substrates” (C-211).
Donald J. McClure founded Acuity Consulting and Training to continue his love affair with vacuum coating and vacuum web coating in particular. Don retired from 3M's Corporate Research Laboratory after spending twenty five years working on a broad range of products and projects that utilized vacuum roll coating and processing. Don has published his work extensively and is a co-inventor on 19 US patents. He served the Society of Vacuum Coaters in many roles including President and Secretary. He has offered his courses on the "Basics of Vacuum Web Coating" and "Sputter Deposition onto Flexible Substrates" for many years. He was recognized by the SVC with their 2004 Nathaniel Sugerman Award for lifetime achievement.
