SVC Education Program

Detailed SVC Course Syllabus

VACUUM TECHNOLOGY: COMPONENTS AND SYSTEMS

SVC V-203: Vacuum Materials and Large System Performance

Materials in Vacuum

The properties of the materials used within vacuum environments are central to the proper construction and performance of large systems. This module describes fundamental, important properties of commonly used vacuum materials.

Seals, Joints and Valves

The majority of vacuum systems in use today are constructed of steel, stainless steel or aluminum. Welding and brazing are used to fabricate chambers. Vacuum systems are of no use unless we can load and unload parts to be treated; this requires windows, doors, and flanges that can be resealed in a reliable manner.

Rough Pumping Large Systems

Most practical production systems today are designed for a specific application. Because of their size, roughing systems are no longer simple. This module describes roughing techniques for several kinds of vacuum pumping applications.

System Performance

How a vacuum system performs is key to a successful process. The ultimate pressure in a system is dependent on a number of factors including outgassing, gasket materials, chamber materials, cleaning procedures, and operating procedures.

Multi-chamber Systems

Manufacturing processes cannot all be done in a traditional single, batch-process chamber. Many processes treat large rolled surfaces, or large rigid surfaces, whereas others process small surface areas individually at high speed.

Instructor: John O'Hanlon, University of Arizona, Tucson