Detailed SVC Course Syllabus
VACUUM TECHNOLOGY: COMPONENTS AND SYSTEMS
SVC V-201: High Vacuum System Operation
Introduction
This module is designed to ensure that all participants have the same starting knowledge, basic definitions, and descriptive terms used in vacuum technology.
- Define a gas
- Define pressure
- Describe components of an atmospheric and a vacuum gas
- Describe basic vacuum applications
- Outline the functions of each component in a system
- Review questions and summary of answers
Rotary Mechanical Pumps
This module covers the construction, characteristics, operating principles, and applications of the following low-rotational speed mechanical pumps:
- Rotary vane pump including function of gas ballast
- Piston pump
- Roots or lobe blower including its economics
- Claw pump
- Screw pump
- Scroll pump
- Diaphragm pump
- Review questions and summary of answers
Diffusion Pumps and Systems
This module first covers the construction, characteristics and operating principles of the diffusion pump. After these concepts are described, the construction and operating principles of a typical diffusion pumped system are covered.
- Diffusion pump construction
- Diffusion pump operating principle
- What is pumping speed?
- Backstreaming and its sources
- How, why and when to use traps and baffles
- Starting, cycling and stopping a diffusion pump system
- Preventing contamination from oil migrating from pumps to chamber
- Preventive maintenance issues
- Review questions and summary of answers
Cryopumps and Systems
This module first covers the construction, characteristics and operating principles of the cryo pump. After these concepts are described, the construction and operating principles of a typical cryo pumped system are covered.
- Cryo pump construction
- Define vapor pressure
- Pumping vapors and gases by cryocondensation
- Pumping vapors and gases by cryosorption
- Cryogenic pumping arrays
- Relative pumping speed of various gases and vapors
- Construction and operation of the helium gas refrigerator
- Starting, cycling and stopping a cryo pumped system
- Regenerating a cryo pump and why it is necessary
- Preventing unwanted gases or vapors from contaminating the process chamber
- Preventive maintenance issues
- Review questions and summary of answers
Turbomolecular Pumps and Systems
This module first covers the construction, characteristics and operating principles of the turbomolecular pump. After these concepts are described, the construction and operating principles of a typical turbomolecular pumped system are covered.
- Turbomolecular pump construction
- Pumping gas by pumped by moving blades.
- Pumping speed
- Gas compression
- Oil, grease and magnetically levitated bearing systems
- Molecular drag pumps
- Starting, cycling and stopping a turbomolecular pumped system
- Preventing oil vapors from contaminating the process chamber
- Preventive maintenance issues
- Review questions and summary of answers
Instructor: John O'Hanlon, University of Arizona, Tucson
