SVC Education Program

• Nucleation and the critical radius
• Effect of temperature on nucleation and growth
• Effect of surface mobility on nucleation and growth
• Coating parameters that affect nucleation and growth

Thermal evaporation

• Vapor pressures of the elements
• Generic evaporation systems
• Resistive evaporation
• Electron beam evaporation
• Cosine distribution of evaporated material
• Masking and substrate motion to achieve coating uniformity
• Ion plating
• Cathodic arc evaporation

Glow discharge sputtering

• Plasmas and plasma generation
• Target bombardment by ions
• Collision cascade
• Sputter yields
• Secondary electron emission
• Structure zone models
• Coating stress
• Coating distribution from round and rectangular cathodes
• Rf sputtering of thick insulating targets
• Reactive sputtering

Ion beam sputtering

• Kaufman ion sources
• Dual ion beam sputtering

Instructor: David Glocker, Isoflux Incorporated