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SVC Used Equipment Bulletin Board

4th Generation Atomic Layer Deposition Tool with all Intellectual Property & Patents

May 9 ONLINE: Absolute Auction of Fully Automated Vacuum Process Cluster Tool for Silicon Carbide Super Lattice Deposition on 200 mm Silicon Wafers via ALD/PVD and CVD Processes. Tool consists of (2) Vacuum Robot Chambers, (1) Integrated Load Lock Chamber, (1) Vacuum Extension Tunnel, (2) Rapid Thermal Processing (RTP) Modules, (1) EPI Silicon Deposition & Rapid Thermal Annealing (RTA) Module, (1) Source Delivery Cabinet, (1) Power Distribution Cabinet and Controls & Power Supply Rack. Visit www.siaai.com for information.

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Society of Vacuum Coaters
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